A New Error Compensation Strategy on Laser Displacement Sensor in Free-Form Surface Measurement

Bin Sun,Bing Li
DOI: https://doi.org/10.1117/12.2214879
2015-01-01
Abstract:The Laser Displacement Sensor is designed according to the principle of laser triangulation. It is a precise geometric measurement sensor, and it is characterized by non-contact and high measuring efficiency. However, the measurement accuracy of the LDS is easily influenced by other factors, especially for free-form surfaces where the incidence angle has greater impact on measurement accuracy and the research is relatively less. The paper proposes a new error compensation strategy and the method of calculating incidence angle. It can effectively improve the measurement accuracy of free-form surfaces by inclination error compensation. The experiment verifies the correctness and reliability of the error model by using a Laser Interferometer. The result shows that the measurement accuracy is less than 10μm.
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