A Large Deflection of Out-Of-Plane Magnetic Actuators Using Surface Micromachining

JM Huang,KM Liew,AQ Liu

DOI: https://doi.org/10.1117/12.395622

2000-01-01

Abstract:A magnetic actuator with torsional-polysilicon flexures, capable of very large out-of-plane displacement (the order of 1mm), and individually controlled with integrated coils that will be discussed in this paper. Magnetic actuator uses coils to produce the magnetic field required for individual microactuator motion, while the off-chip magnetic actuates unclamped devices. The advantages of the actuators are exploited: large deflections are achieved using magnetic forces to actuate compliant microflexure structures; Actuation is achieved using magnetic fields generated by off-chip sources; The actuating force is applied in a conducting environment such as a saline fluid. individually prototype-torsional actuators are deflected over 70 degrees out of the plane of the wafer, when a current of 100 mA flows through a twenty-turn coil integrated into each actuator. The magnetic actuator provides an interaction force of several tens muN between the coil-driven and the off-chip magnetic field. The micro actuators are capable of achieving large deflections (100s of mum) in stationary air and fluid dynamic flow. A completed model of static mechanical and magnetic is built up to characterize mechanical properties including angular deflection, vertical deflection, bending stresses of thin plate. Both the coil-driven and the actuator structure are constructed in polysilicon surface micromachining process.