Design and Fabrication of a Micro Electromagnetic Actuator Based on PDMS Diaphragm Embedded Hard Magnets

苏宇锋,段智勇,郑鹏,刘武发,陈文元

DOI: https://doi.org/10.3969/j.issn.1002-1841.2009.04.022

2009-01-01

Abstract:A bi-directional electromagnetic microactuator,which was composed of an integrated planar coil and a flexible polydimethyl siloxane(PDMS) diaphragm embedded permanent magnets was presented.Theoretical and numerical methods were adopted to analyze the geometrical parameters of the diaphragm of the microactuator.There is a deviation of 7.96% between the two methods.Electro-plating under external magnetic field was carried out to improve the magnetic properties of the electroplated magnet,including coercivity,remanence and magnetic energy and so on.The magnet post is 50 μm×50 μm×20 μm,and the measured maximum coercivity,remanence and maximum magnetic energy are 208.73 kA/m,0.2 T and 10.15 kJ/m3.Using the electroplating of magnet,the fabrication process of the microactuator is compatible with MEMS process.