Micro-patterning of Resin-Bonded NdFeB Magnet for a Fully Integrated Electromagnetic Actuator

Kai Tao,Jin Wu,Ajay Giri Prakash Kottapalli,Di Chen,Zhuoqing Yang,Guifu Ding,Sun Woh Lye,Jianmin Miao
DOI: https://doi.org/10.1016/j.sse.2017.09.006
IF: 1.916
2017-01-01
Solid-State Electronics
Abstract:This paper reports a fully-integrated, batch-fabricated electromagnetic actuator which features micro-patterned NdFeB magnets. The entire actuator is fabricated through MEMS-compatible laminated surface micromachining technology, eliminating the requirement for further component assembly processes. The fabrication strategy allowed the entire volume of the actuator to be reduced to a small size of 2.5×2.5×2mm3, which is one of the smallest NdFeB-based electromagnetic actuators demonstrated to date. The magnetic properties of NdFeB thin films are further investigated and optimized using different types of lithographically-defined micromolds. By altering the direction of the input current, actuating displacements of approximately ±10µm are achieved during both the attraction and the repulsion operations. This work demonstrates the viability and compatibility of using polymer-bonded magnets for magnetic MEMS applications.
What problem does this paper attempt to address?