Abstract:Graphene wafers have emerged in response to the increasing demand of wafer-scale two-dimensional materials and high-performance on-chip devices in the field of integrated circuits, microelectromechanical systems, and sensors.Waferscale graphene films display great application potential, owing to their atomic layer thickness, excellent thermal and electrical conductivity, and compatibility with wafer-processing technology.Therefore, batch production of graphene wafers is exceedingly crucial.The chemical vapor deposition (CVD) method has attracted attention for the production of high-quality graphene wafers with high controllability, high compatibility, and low cost.Mature CVD manufacturing has been widely employed in the semiconductor industry to date, aiding in the industrialization of CVD graphene wafers and creating opportunities for graphene to enter the new era of nanoelectronics.The quality of graphene wafers has a significant impact on the subsequent device fabrication; hence, considerable efforts have been made to date to realize precise control over domain size, structural defects, and layer thickness during synthesis.In this study, we summarize the recent progress made in wafer-scale CVD graphene synthesis.Initially, we introduce the quality requirements of graphene wafers targeting various application scenarios, and propose the classification of graphene wafers.Single crystallinity is considered to be a key requirement for the graphene used in high-performance electronics and optoelectronics.We then review the recent CVD-derived graphene wafers with regard to substrate types (metal/nonmetal), highlighting the constrictions in graphene quality and corresponding synthetic solutions.Batch synthesis of graphene wafers is further discussed.The significant role of flow dynamics in the up-scaling process is emphasized, followed by relevant experimental instances based on computational fluid dynamics simulations.Finally, strategies for obtaining graphene wafers are overviewed, with the proposal of future perspectives.This study focuses on three areas: (1) Application requirements for the quality of graphene wafers, including target substrate types and as-grown graphene features (chemical stability and electrical and thermal properties), (2) CVD strategies of graphene wafers: As for the growth scenarios on metal substrates, controllable preparation of bilayer/multilayer graphene and the elimination of structural defects remain challenging.With respect to the synthesis over nonmetal wafers, concrete examples highlighting the epitaxial growth on a crystalline substrate and tailorable growth on a surface-reconstructed substrate are summarized.(3) Batch synthesis of graphene wafers: CVD routes for scalable production are explored.

Synthesis Of Large-Size Graphene By Chemical Vapor Deposition

Synthesis Of Large-Area Single-Crystal Graphene

Chemical Vapor Deposition Growth of Large Grapheme Single Crystal from Ethanol

Graphene films with large domain size by a two-step chemical vapor deposition process

Toward large-scale CVD graphene growth by enhancing reaction kinetics via an efficient interdiffusion mediator and mechanism study utilizing CFD simulations

Chemical vapor deposited graphene: From synthesis to applications

Batch Synthesis of Transfer-Free Graphene with Wafer-Scale Uniformity

Synthesis of Graphene Wafers: from Lab to Fab

Large-Area Synthesis of High-Quality and Uniform Monolayer Graphene Without Unexpected Bilayer Regions

A Systematic Study of Atmospheric Pressure Chemical Vapor Deposition Growth of Large-Area Monolayer Graphene.

Repeated Growth-Etching-Regrowth for Large-Area Defect-Free Single-Crystal Graphene by Chemical Vapor Deposition

Oxide-assisted Growth of Scalable Single-Crystalline Graphene with Seamlessly Stitched Millimeter-Sized Domains on Commercial Copper Foils.

Self-Terminating Confinement Approach for Large-Area Uniform Monolayer Graphene Directly over Si/Siox by Chemical Vapor Deposition

Achievements and Challenges of Graphene Chemical Vapor Deposition Growth

Toward batch synthesis of high-quality graphene by cold-wall chemical vapor deposition approach

Synthetic Graphene Grown by Chemical Vapor Deposition on Copper Foils

Toward Mass Production of CVD Graphene Films

Criteria for the Growth of Large-Area Adlayer-Free Monolayer Graphene Films by Chemical Vapor Deposition

Chemical Vapor Deposition Growth of Bernal-Stacked Bilayer Graphene by Edge-Selective Etching with H2O

Synthesis of Wafer‐Scale Graphene with Chemical Vapor Deposition for Electronic Device Applications

Large-Area Synthesis of High-Quality and Uniform Graphene Films on Copper Foils