Highly Efficient Silicon Nanoarray Solar Cells by A Single-Step Plasma-Based Process

S. Xu,S. Y. Huang,I. Levchenko,H. P. Zhou,D. Y. Wei,S. Q. Xiao,L. X. Xu,W. S. Yan,K. Ostrikov
DOI: https://doi.org/10.1002/aenm.201100085
IF: 27.8
2011-01-01
Advanced Energy Materials
Abstract:Highly efficient solar cells (conversion efficiency 11.9%, fill factor 70%) based on the vertically aligned single-crystalline nanostructures are fabricated without any pre-fabricated p-n junctions in a very simple, single-step process of Si nanoarray formation by etching p-type Si(100) wafers in low-temperature environment-friendly plasmas of argon and hydrogen mixtures.
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