Infrared Multiwavelength He-Ne-Laser Absolute Distance Interferometer for Diameter Measurement of Large-Scale Workpiece

Z YOU,WM REN,JW LIANG
DOI: https://doi.org/10.1117/12.156262
1993-01-01
Abstract:This paper describes a new type multiwavelength HeNe laser interferometer for diameter measurement of large scale work piece. The laser can oscillate on two wavelength 3. 39l2i and 3. 3922pm simultaneously. By switching between two equal intensity state it provides a two order wavelength hierarchy pyramid from lm to 3. 39l2um. The range of this system is up to 20m and the accuracy 5jim+l. 5*lO6L. ( L is the measured distance
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