Absolute Distance Measurement by Combining Phase Distance Meter and Heterodyne Interferometer

ZHOU Xiao-shan,LI Yan
DOI: https://doi.org/10.3969/j.issn.1002-2082.2010.06.029
2010-01-01
Abstract:To overcome the shortcomings of limited range and low precision in conventional absolute distance measurement,a new method is introduced by combining phase distance meter and heterodyne interferometer using He-Ne laser in dual longitudinal modes.The phase distance meter is used for coarse measurement and the heterodyne interferometer using He-Ne laser in dual longitudinal modes is used for accurate measurement.The result depends on the reliable combination of the two methods.A measurement system was built to verify the feasibility of this method and the sources of measurement error were analyzed.The comparison experiment was made against dual-frequency laser interferometer.The result shows that the system achieves the expected accuracy and its standard deviation is better than 1 mm,which meets the large-scale measurement requirement.
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