Abstract:The emerging field of silicon photonics seeks to unify the high bandwidth of optical communications with CMOS microelectronic circuits. Many components have been demonstrated for on-chip optical communications, including those that utilize the nonlinear optical properties of silicon[1, 2], silicon dioxide[3, 4] and silicon nitride[5, 6]. Processes such as second harmonic generation, which are enabled by the second-order susceptibility, have not been developed since the bulk $\chi^{(2)}$ vanishes in these centrosymmetric CMOS materials. Generating the lowest-order nonlinearity would open the window to a new array of CMOS-compatible optical devices capable of nonlinear functionalities not achievable with the?$\chi^{(3)}$ response such as electro-optic modulation, sum frequency up-conversion, and difference frequency generation. Here we demonstrate second harmonic (SH) generation in CMOS compatible integrated silicon nitride (Si3N4) waveguides. The $\chi^{(2)}$ response is induced in the centrosymmetric material by using the nanoscale structure to break the bulk symmetry. We use a high quality factor Q ring resonator cavity to enhance the efficiency of the nonlinear optical process and detect SH output with milliwatt input powers.

An Optical Diode Based on Nonlinear Second-Order Silicon Microring Resonator

Strong Nonlinear Optics In On-Chip Coupled Lithium Niobate Microdisk Photonic Molecules

An All-Silicon Optical Diode

A Theoretical Model for an Optical Diode Built with Nonlinear Silicon Microrings

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High-performance Silicon PIN Diode Switches in the 2-Μm Wave Band.

Compact microring resonators integrated with grating couplers working at 2 μm wavelength on silicon-on-insulator platform.

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Compact Optical Temporal Differentiator Based on Silicon Microring Resonator.

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Channel-Selectable Optical Link Based on a Silicon Microring for On-Chip Interconnection

Ultra-High Dynamic Extinction Ratio Electro-Optical Modulator with Coupled Microring on SOI Platform

Silicon optical diode based on cascaded photonic crystal cavities.

An All-Silicon Passive Optical Diode.

Second-Harmonic Generation in Silicon Nitride Ring Resonators