Fabrication and Characterization of a Low Power Consumption Ethanol Gas Sensor Based on a Suspended Micro-Hotplate

Meihua Li,Weiping Yan,Huichao Zhu,Zhenya Guo,Zhenan Tang

DOI: https://doi.org/10.1039/c5ra05515f

IF: 4.036

2015-01-01

RSC Advances

Abstract:A low power consumption ethanol gas sensor based on a suspended micro-hotplate was fabricated using the droplet guiding deposition technique.

What problem does this paper attempt to address?

A low power catalytic combustion gas sensor based on a suspended membrane microhotplate.

Lei Xu,Tie Li,Xiuli Gao,Yuelin Wang,Rui Zheng,Lei Xie,Lichung Lee

DOI: https://doi.org/10.1109/NEMS.2011.6017303

2011-01-01

Abstract:A microhotplate based catalytic combustion gas sensor with low power consumption employing Pd-Pt/ γ-Al 2O 3 is presented in this paper. The microhotplate was fabricated on a silicon substrate by micromachining process. And the sensitive material Pd-Pt and compensation material γ-Al 2O 3 were prepared by sol-gel process. This sensor has been tested under constant working voltage to methane gas and achieved good performance. With the increasing of working voltage, both the output signal and power consumption of the sensor increased. The ratio of the sensitivity to power consumption was considered as an optimizing factor for selecting a rational working voltage. The sensor output signal showed a fairly linear relationship to the methane gas concentration. It achieved a sensitivity of 2mV/%CH 4 to 50% LEL methane gas at a low power of 52mW. © 2011 IEEE.
An Ultra Low Power Consumption Methane Gas Detector Based on an Optimized Suspended Membrane Microhotplate

Lei Xu,Tie Li,Rui Zheng,Lei Xie,Lichung Lee,Jiwei Jiao,Yuelin Wang

DOI: https://doi.org/10.1166/sl.2011.1600

2011-01-01

Sensor Letters

Abstract:In this paper a new developed methane gas detector based on microhotplates with ultra low power consumption is demonstrated. A suspended membrane microhotplate with platinum (Pt) heat element was designed and fabricated carefully by optimizing its structure. Four high length-to-width ratio beams decreased its power consumption successfully and the corner compensations improved its mechanical strength. Based on this microhotplate, a catalytic combustion type methane gas detector with Pd-Pt/gamma-Al2O3 catalyst was formed. Test results indicate that the microhotplate consumed only 9 mW when heated up to 400 degrees C. The methane gas detector achieved a sensitivity of 1.1 mV/% CH4 at a power of 30 mW.
Wafer-level Fabrication of Low Power Consumption Integrated Alcohol Microsensor

Hairong Wang,Mengya Wang,Weitao Lei,Xiaowei Chen,Hao Huang,Jiuhong Wang

DOI: https://doi.org/10.1049/mnl.2018.5183

2018-01-01

Micro & Nano Letters

Abstract:An integrated alcohol microgas sensor was designed and fabricated based on TiO2/SnO2 nanocomposites acting as a sensing layer and microheater providing working temperature. The stacked TiO2/SnO2 nanocomposites were prepared by magnetron sputtering. A unique suspended membrane consisting of Si3N4/SiO2/Si3N4/SiO2 four layers was prepared by different methods, respectively, and applied in microheater to support the electrodes and sensing layer for reducing power consumption. The fabrication process tackled the difficulty that the sensing layer preparation is incompatible with microelectromechanical systems micromachining technology and realised the mass production of the wafer-level sensor chips with good consistency. The microalcohol sensors showed excellent response characteristics for alcohol (50-600 ppm) detection at low power consumption (39 mW).
Design of Highly Sensitive and Selective Ethanol Sensor Based on Α-Fe2o3/nb2o5 Heterostructure.

Rabia,Sajid Rauf,Mahmood Ul Haq,Sanam Attique,Salah Ud Din,Nasir Ali,Yichuan Guo,Hongwen Chen,Yang Tian,Jianguo Lu

DOI: https://doi.org/10.1088/1361-6528/abdd5e

IF: 3.5

2021-01-01

Nanotechnology

Abstract:The introduction of heterostructures is a new approach in gas sensing due to their easy and quick transport of charges. Herein, facile hydrothermal and solid-state techniques are employed to synthesize an α-Fe2O3/Nb2O5 heterostructure. The morphology, microstructure, crystallinity and surface composition of the synthesized heterostructures are investigated by scanning electron microscope, transmission electron microscope, x-ray diffraction, x-ray photoelectron spectroscopy and Brunauer–Emmett–Teller analyses. The successful fabrication of the heterostructures was achieved via the mutual incorporation of α-Fe2O3 nanorods with Nb2O5 interconnected nanoparticles (INPs). A sensor based on the α-Fe2O3(0.09)/Nb2O5 heterostructure with a high surface area exhibited enhanced gas-sensing features, maintaining high selectivity and sensitivity, and a considerable recovery percentage towards ethanol gas. The sensing response of the α-Fe2O3(0.09)/Nb2O5 heterostructure at lower operating temperature (160 °C) is around nine times higher than a pure Nb2O5 (INP) sensor at 180 °C with the flow of 100 ppm ethanol gas. The sensors also show excellent selectivity, good long-term stability and a rapid response/recovery time (8s/2s, respectively) to ethanol. The superior electronic conductivity and upgraded sensitivity performance of gas sensors based on the α-Fe2O3(0.09)/Nb2O5 heterostructure are attributed due to its unique structural features, high specific surface area and the synergic effect of the n–n heterojunction. The promising results demonstrate the potential application of the α-Fe2O3(0.09)/Nb2O5 heterostructure as a good sensing material for the fabrication of ethanol sensors.
Integration of SnO2 Nanoparticles with Micro-hotplatform for Low-power-consumption Gas Sensors

Shufeng Peng,Dongcheng Xie,Jin Wang,Minqiang Chen,Lei Xu

DOI: https://doi.org/10.18494/sam.2018.2006

IF: 1.2

2018-01-01

Sensors and Materials

Abstract:A gas sensor with low power consumption was manufactured using a suspended micro-hotplatform (MHP) fabricated by MEMS technology. Tin oxide nanoparticles, synthesized by the hydrothermal method, were deposited on the MHP by dip coating in the form of slurry. The obtained SEM images indicated that nanoparticles were well connected and uniform in size. The gas sensing performance was also investigated in both dynamic and static test systems. In the dynamic test system, the response (R-air/R-gas) of the sensor exhibited a representative linear relationship with hydrogen at a power of 14.42 mW and changed from 1.17 to 4.51 at 5 to 100 ppm hydrogen. In the static test system, the sensor demonstrated an obvious response to ethanol, ammonia, and glycol; the response to the target gas of ammonia at a concentration of 120 ppm reached up to 23.94. The power consumption of the sensor was only 16 mW with a platinum (Pt) heating resistor at 255 degrees C.
A novel micro-structure ethanol gas sensor with low power consumption based on La0.7Sr0.3FeO3

Li Liu,Tong Zhang,Qi Qi,Lei Zhang,Weiyou Chen,Baokun Xu

DOI: https://doi.org/10.1016/j.sse.2007.05.016

IF: 1.916

2007-01-01

Solid-State Electronics

Abstract:A micro-structure ethanol gas sensor on a silicon substrate based on the nano complex oxide La0.7Sr0.3FeO3 was successfully designed and fabricated. The heater electrode and signal electrode were designed on the same plane in order to reduce the cross-talk and make the fabrication easier. The results of the simulations are used to improve the temperature distribution on the sensor. Compared to classical sintered gas sensors, the optimized design leads to a low power consumption. The experimental results show that the power consumption is approximately two thirds of the sintered gas sensors with the same active material. The sensitivity of this novel sensor is 8.0 when the concentration of ethanol is 500ppm, and the response time is about 1.5s and the recovery is about 2.5s.
A Low Power Bridge-Type Gas Sensor with Enhanced Sensitivity to Ethanol by Sandwiched ZnO/Au/ZnO Film Sputtered in O₂ Atmosphere

Ruichen Liu,Dongcheng Xie,George Adedokun,Feng Xue,Lei Xu,Feng Wu

DOI: https://doi.org/10.1109/jsen.2021.3088990

IF: 4.3

2021-01-01

IEEE Sensors Journal

Abstract:This paper proposes a ZnO-based gas sensor fabricated entirely by micro-electro-mechanical system (MEMS) process. The gas sensor is based on a narrow bridge-type micro-heater, which achieve ultra-low static power consumption. A physical vapor deposition (PVD) sputtering method was employed in depositing n-type ZnO-based sensing materials on this heater. Ethanol, a common VOC gas was selected as a choice of gas to be tested, and to enhance the performance of ethanol, a thin layer of metal additive Au is buried between two ZnO film layers in an atmosphere of O2 to form a “sandwiched” ZnO/Au/ZnO structure. The morphology and microstructure of the sensors are observed by SEM and AFM, its crystal structure is characterized by XRD, and its surface characteristic is analyzed by XPS. The results indicate that the “sandwiched” sensing layer shows higher response to ethanol compared with single-layer ZnO, and 15 ( $\text{R}_{\text{air}} /\text{R}_{\text{gas}}$ ) was achieved as the best sensitivity to 100 ppm ethanol with the sensor consuming a low power consumption of just 12.17 mW
Design and Fabrication of Micro-Nano Fusion Gas Sensor Based on Two-Beam Micro-Hotplatform

Lianfeng Guo,Lei Xu,Zongke Xu,Guotao Duan,Yi Wang,Hong Zhou,Yanxiang Liu,Weiping Cai,Yuelin Wang,Tie Li

DOI: https://doi.org/10.1007/s00542-016-3091-0

2016-01-01

Microsystem Technologies

Abstract:Micro-nano fusion gas sensors integrating two-beam micro-hotplatform with nanostructured porous film were fabricated in this study. The micro-hotplatform (MHP) was manufactured using standard micro-electro-mechanical systems technology in wafer runs. Based on a colloidal crystal template method, highly ordered porous tin dioxide films were in situ grown on the MHP. The as-fabricated sensors achieved the highest response at 250 °C with power consumption only 24 mW. Due to the low thermal capacity and ordered porous thin films of the sensor, the response time was about 2 s. The sensors are sensitive to ethanol in a large range from 0.1 to 250 ppm. The developed sensor here with high performance is an excellent candidate which can be incorporated into portable devices for alcohol detection such as breath analyzers.
Au-loaded In2O3 Nanofibers-Based Ethanol Micro Gas Sensor with Low Power Consumption

Xiujuan Xu,Huitao Fan,Yantong Liu,Lijie Wang,Tong Zhang

DOI: https://doi.org/10.1016/j.snb.2011.08.053

2011-01-01

Abstract:Au-loaded In2O3 nanofibers, with different Au concentrations from 0.1wt% to 0.4wt%, were successfully prepared by an electrospinning method and characterized via scanning electron microscopy (SEM) and X-ray diffraction (XRD). The results showed that the fibers with diameters ranged from 80 to 100nm were made up of cubic In2O3. The nanofibers were deposited on a silicon substrate with micro hot-plate and signal electrodes to construct a micro gas sensor. The ethanol sensing properties of the sensors based on Au-loaded In2O3 nanofibers with different Au concentrations were investigated. It is found that the 0.2wt% Au-loaded In2O3 based sensors possessed the characterization of high response, fast response/recovery and low power consumption.
From Ceramic Tube to Microcantilever: A New Strategy for Low Power, Fast Heating and High Integrated Metal Oxide Semiconductor Gas Sensor

Dongcheng Xie,Ruichen Liu,Yujie Yang,Feng Xue,Peng Wang,Wenjing Wang,Dongliang Chen,Feng Wu,Lei Xu

DOI: https://doi.org/10.1109/marss49294.2020.9307895

2020-01-01

Abstract:A microcantilever-type metal oxide semiconductor (MOS) gas sensor was successfully designed and fabricated via typical micro-electro-mechanical system (MEMS) technique. The active region is on a narrow and long single cantilever, to achieve very low static power consumption and very fast heating response. The complicated meandering microheater and interdigital electrode structure are removed to make the sensor the most simplified, which greatly reduces the total size of the sensor and improves the integration. Microcantilever heaters were fabricated on a four inch Si wafer using MEMS process, and SnO2 was loaded as the sensing material to form the complete sensor. Static testing of ethanol indicates that the sensor can detect and distinguish 0-10 ppm (1 ppm step) and 10-100 ppm (10 ppm step) ethanol with a static power consumption of 4.32 mW, while dynamic testing of hydrogen indicates that 0-10 ppm (2 ppm step) and 10-100 ppm (10 ppm step) hydrogen can be detected with a static power consumption of 7.16 mW. The sensor shows a good linear characteristic and quadratic characteristic to low concentration range (0-10 ppm) and high concentration range (0-100 ppm) of ethanol and hydrogen, respectively.
ZnO nanowires grown on SOI CMOS substrate for ethanol sensing

S. Santra,P.K. Guha,S.Z. Ali,P. Hiralal,H.E. Unalan,J.A. Covington,G.A.J. Amaratunga,W.I. Milne,J.W. Gardner,F. Udrea

DOI: https://doi.org/10.1016/j.snb.2010.01.009

2010-01-01

Abstract:This paper reports on the integration of zinc oxide nanowires (ZnO NWs) with a silicon on insulator (SOI) CMOS (complementary metal oxide semiconductor) micro-hotplate for use as an alcohol sensor. The micro-hotplates consist of a silicon resistive micro-heater embedded within a membrane (composed of silicon oxide and silicon nitride, supported on a silicon substrate) and gold bump bonded aluminum electrodes that are used to make an ohmic contact with the sensing material. ZnO NWs were grown by a simple, low-cost hydrothermal method and characterised using SEM, XRD and photoluminiscence methods. The chemical sensitivity of the on-chip NWs to ethanol vapour (at different humidity levels) was characterised at two different temperatures namely, 300°C and 400°C (power consumption was 24mW and 33mW, respectively), and the sensitivity was found to be 0.1%/ppm (response 4.7 at 4363ppm). These results show that ZnO NWs are a promising material for use as a CMOS ethanol gas sensor that offers low cost, low power consumption and integrated circuitry.
Development of a Sensitive Gas Sensor by Trapping the Analytes on Nanomaterials and in Situ Cataluminescence Detection

Fang Wen,Sichun Zhang,Na,Yayan Wu,Xinrong Zhang

DOI: https://doi.org/10.1016/j.snb.2009.06.014

2009-01-01

Abstract:An optical sensor for ethanol has been proposed by trapping the analytes on sensing nanomaterials at room temperature and detecting them in situ by recording the cataluminescence (CTL) signals with fast elevated temperature. Sensing nanomaterials of ZrO2 were directly deposited on heating filament which enables the temperature programming for trapping and detecting the interested analytes. The miniaturized sensing unit has low incandescent radiation so as to provide the high signal-to-noise ratio. Under the optimized conditions, the linear range for the determination of ethanol vapor is 1.0×10−3 to 1.0mgL−1. A detection limit (S/N=3) is 2.0×10−4mgL−1 (0.1ppm), which is improved about 3000-fold for ethanol compared with previous CTL sensors. The relative standard deviation (RSD) is 1.2% (n=7) for ethanol samples at a concentration of 0.08mgL−1. The stability was demonstrated by continuous reaction with ethanol for 120h. This sensor has been applied to monitor the ethanol concentration in human expired gas after drinking, and the results agreed well with the reference values. This miniature ethanol sensor offers higher sensitivity, faster response and lower power consumption, which make it very promising in developing hand-hold sensing device for field detection.
A Single Microcantilever-Type Gas Sensor with Enhanced Sensitivity to Ethanol by Sputtering ZnO with Au Embedded in O2 Atmosphere

Ruichen Liu,Dongcheng Xie,George Adedokun,Feng Xue,Lei Xu,Feng Wu

DOI: https://doi.org/10.1109/transducers50396.2021.9495399

2021-01-01

Abstract:This paper proposes a microcantilever-type zinc oxide (ZnO) gas sensor fabricated using typical micro-electro-mechanical system (MEMS) process. To achieve low power consumption, we developed a long narrow single cantilever beam and the sensing region is at the free end of it. ZnO was sputtered under the atmosphere of O 2 as the sensing layer. And a thin Au buried layer was deposited to form the “sandwiched” structure of a thin Au layer between two ZnO layers. Ethanol, as a typical volatile gas, was chosen to verify the performance of the proposed sensor. The results indicate that the “sandwiched” sensing layer shows higher response to ethanol compared with single-layer ZnO, and the best sensitivity to 100 ppm ethanol is 7.11. Besides, the response time is 12 s and the sensor consumes a low power consumption of only 5.81 mW.
A Method of Ultra-Low Power Consumption Implementation for MEMS Gas Sensors

Yu Bing,Fuyun Zhang,Jiatong Han,Tingting Zhou,Haixia Mei,Tong Zhang

DOI: https://doi.org/10.3390/chemosensors11040236

2023-01-01

Chemosensors

Abstract:In recent years, there has been a growing need for the development of low-power gas sensors. This paper proposes pulse heating and a corresponding measurement strategy using a Pulse Width Modulation (PWM) signal to realize the ultra-low power consumption for metal oxide semiconductor (MOS) gas sensors. A Micro-Hot-Plate (MHP) substrate was chosen to investigate the temperature and power characteristics of the MHP under different applied heating methods. The temperature of this given substrate could respond to the applied voltage within 0.1 s, proving the prac ticability of a pulse heating strategy. In addition, Pd-doped SnO2 was synthesized as the sensing material in the implementation of an ultra-low power gas sensor. The sensing performance and power consumption under different conditions were compared in the detection of reducing gases such as ethanol (C2H5OH) and formaldehyde (HCHO). Additionally, the results revealed that the sensor could work under PWM excitation while reducing the operating power to less than 1mW. The features shown in the measurements provide the feasibility for MOS gas sensors' application in wearable and portable devices.
Ultra High Performance Gas Sensor Based on IC Compatible Fusion of Micromachined Hotplatform and Nanostructured Porous Film

Lei Xu,Zhengfei Dai,Tie Li,Guotao Duan

DOI: https://doi.org/10.1109/transducers.2013.6627205

2013-01-01

Abstract:Ultra-high performances of low power, high sensitivity, and fast response was achieved in a novel micro/nano gas sensor that fused a microhotplatform (MHP) and a monolayer of ordered porous SnO2 nanofilm. Based on the MHP with a platinum microheater and interdigital electrode (IDE), a highly ordered SnO2 porous film was in-situ synthesized using a polystyrene sphere monolayer colloidal crystal template. Test results indicated that the sensor was sensitive to 100 ppb ethanol with a sensitivity of 1.6 (Rair/Rgas), a power consumption of 25 mW and a response time less than 2 s. The detection limit of the sensor was calculated as 9 ppb.
A Novel Ethanol Gas Sensor Based on ZnO-microwire

Fei Li,Heqiu Zhang,Lizhong Hu,Yingmin Luo,Yu Zhao,Yu Qiu,Jiuyu Ji,Lunlun Yue

DOI: https://doi.org/10.1007/s10854-013-1480-z

2013-01-01

Journal of Materials Science Materials in Electronics

Abstract:One-dimensional (1D) ZnO microwires were successfully synthesized by chemical vapor deposition and their structural and morphological properties were analyzed by X-ray diffraction and scanning electron microscopy, demonstrating that the microwires were single crystalline with perfect hexagonal structure and smooth surface. Using these 1D microstructures, we fabricated a novel ZnO-based ethanol gas sensor. Operating at room temperature, the sensor was found to have good sensing characteristics. The reliability and stability of the sensor could be improved by connecting multiple 1-wire devices (1-WD) in parallel into a multi-wires device. In interior natural lighting environment and under 3 V bias, the response and recovery time of the 1-WD to 200 ppm ethanol gas were < 10 s and about 300 s, respectively, and the minimum and maximum detection limit were about 2 and 200 ppm, respectively. A sensing model was proposed for discussing the performance of the sensor. The simplicity in fabrication, low power consumption and low cost make the sensor suitable for practical application in many fields, especially in identifying driving under the influence and chemical industry monitoring.
Fabrication of a Wireless Portable Ethanol Detecting Device Based on Synthesized CuO Nanoplates With the Capability to Alert for Elevated Gas Levels

Mehdi Moayedi,Hamid Reza Ansari,Zoheir Kordrostami,Ali Mirzaei

DOI: https://doi.org/10.1109/tim.2024.3400335

IF: 5.6

2024-05-30

IEEE Transactions on Instrumentation and Measurement

Abstract:The proposed device utilizes a small CuO-based sensor for measuring the concentration of ethanol vapor and issuing alerts for dangerously elevated ethanol levels. We have synthesized CuO nanoplates (NPs) via a facile hydrothermal method. Different advanced characterization techniques were employed to demonstrate the desired phase, crystallinity, morphology, and chemical composition. The Pt interdigitated electrodes (IDEs) on alumina substrate with an area of mm containing six fingers, with m gap spacing, and m finger widths have been employed. To obtain the working temperature a microheater was fabricated and used. Additionally, to facilitate the sensing test sensor holder was employed. The CuO-NPs-based sensor was embedded in the fabricated self-powered portable device and exposed to ethanol vapor at different temperatures. The sensor showed a response of 17.6–100 ppm ethanol at 160 °C. Also, a long-term stability of 20 days has been reported. NP morphology offered a high surface area and adsorption sites for incoming ethanol gas molecules which plays a vital role in the performance of the sensor.

engineering, electrical & electronic,instruments & instrumentation
An ethanol sensor based on cataluminescence on ZnO nanoparticles.

Huarong Tang,Yaming Li,Chengbin Zheng,Jun Ye,Xiandeng Hou,Yi Lv

DOI: https://doi.org/10.1016/j.talanta.2007.01.035

IF: 6.1

2007-01-01

Talanta

Abstract:A novel gas sensor for the determination of ethanol was proposed in the present work, which was based on the generated cataluminescence emission from catalytic oxidation of ethanol on the surface of ZnO nanoparticles. The cataluminescence characteristics and the effect of different parameters on the signal intensity, such as morphology of synthesized ZnO, temperature and flow rate, were discussed in detail. Under the optimized experimental conditions, the calibration curve of cataluminescence intensity versus ethanol vapor concentration was linear in the range 1.0-100ppm, and with a detection limit of 0.7ppm (S/N=3). Compared with the traditional electrical conductivity-based ZnO gas sensor for the determination of ethanol, the proposed ethanol sensor showed the advantages of high sensitivity, high selectivity and low working temperature.
Research of Low-Power MEMS-Based Micro Hotplates Gas Sensor: A Review

Zhenyu Yuan,Fan Yang,Fanli Meng,Kaiyuan Zuo,Jin Li

DOI: https://doi.org/10.1109/JSEN.2021.3088440

IF: 4.3

2021-01-01

IEEE Sensors Journal

Abstract:In this paper, the research status of low power micro hot plate gas sensor is reviewed. This type of sensor is characterized by the combination of MEMS technology and related insulation measures. Compared with the traditional ceramic tubular sensor, the power consumption of the sensor is greatly reduced, which provides the possibility of remote sensor arrangement and long term stable operation. Th...
Ethanol Gas Sensing with Lower Temperature and Higher Response Based on Three-Dimensional Multilevel Materials Composed of Micron Hollow Carbon Spheres@sno2 Nanoparticles

Zehua Huang,Weizhe Wang,Debiao Xiao,Yuzhi Mo,Shuangbao Wang,Zhimou Xu,Jing Peng

DOI: https://doi.org/10.1016/j.mtcomm.2022.104105

IF: 3.8

2022-01-01

Materials Today Communications

Abstract:Metal oxide semiconductor gas sensors (MOS) based on tin oxide have excellent performance in ethanol gas detection and have been widely used in industrial production, environmental protection, and road safety detection. However, conventional tin oxide sensors can only show excellent detection performance for ethanol gas above 250 degrees C. In this work, nano-size tin oxide particles were grown on the micron hollow carbon spheres derived from the biomaterial chlorella by a gel method. This three-dimensional hierarchical porous structure can enrich ethanol gas at a certain temperature. Ethanol gas sensor fabricated with this material has better sensing performance at low temperature (168-200 degrees C).

Fabrication and Characterization of a Low Power Consumption Ethanol Gas Sensor Based on a Suspended Micro-Hotplate

A low power catalytic combustion gas sensor based on a suspended membrane microhotplate.

An Ultra Low Power Consumption Methane Gas Detector Based on an Optimized Suspended Membrane Microhotplate

Wafer-level Fabrication of Low Power Consumption Integrated Alcohol Microsensor

Design of Highly Sensitive and Selective Ethanol Sensor Based on Α-Fe2o3/nb2o5 Heterostructure.

Integration of SnO2 Nanoparticles with Micro-hotplatform for Low-power-consumption Gas Sensors

A novel micro-structure ethanol gas sensor with low power consumption based on La0.7Sr0.3FeO3

A Low Power Bridge-Type Gas Sensor with Enhanced Sensitivity to Ethanol by Sandwiched ZnO/Au/ZnO Film Sputtered in O₂ Atmosphere

Design and Fabrication of Micro-Nano Fusion Gas Sensor Based on Two-Beam Micro-Hotplatform

Au-loaded In2O3 Nanofibers-Based Ethanol Micro Gas Sensor with Low Power Consumption

From Ceramic Tube to Microcantilever: A New Strategy for Low Power, Fast Heating and High Integrated Metal Oxide Semiconductor Gas Sensor

ZnO nanowires grown on SOI CMOS substrate for ethanol sensing

Development of a Sensitive Gas Sensor by Trapping the Analytes on Nanomaterials and in Situ Cataluminescence Detection

A Single Microcantilever-Type Gas Sensor with Enhanced Sensitivity to Ethanol by Sputtering ZnO with Au Embedded in O2 Atmosphere

A Method of Ultra-Low Power Consumption Implementation for MEMS Gas Sensors

Ultra High Performance Gas Sensor Based on IC Compatible Fusion of Micromachined Hotplatform and Nanostructured Porous Film

A Novel Ethanol Gas Sensor Based on ZnO-microwire

Fabrication of a Wireless Portable Ethanol Detecting Device Based on Synthesized CuO Nanoplates With the Capability to Alert for Elevated Gas Levels

An ethanol sensor based on cataluminescence on ZnO nanoparticles.

Research of Low-Power MEMS-Based Micro Hotplates Gas Sensor: A Review

Ethanol Gas Sensing with Lower Temperature and Higher Response Based on Three-Dimensional Multilevel Materials Composed of Micron Hollow Carbon Spheres@sno2 Nanoparticles