Abstract:¶ Corresponding authors Advances in the field of micro/nano-electro-mechanical systems (MEMS and NEMS) now offer unique opportunities in the design of small and ultrasensitive analytical methods. MEMs/NEMs have demonstrated their unique advantages when they are combined with chemistry and biology, including fast, real-time responses. In addition, MEMs and NEMS are small enough to be integrated into other devices. One of the most promising MEMs is microcantilevers, which have been proven to be an outstanding transducer for chemical and biological sensors. This review summarizes the receptors and immobilization approaches reported for nanomechanical sensors and interpret the mechanism and dynamic relationship of recognition induced nanomechanical motions. Since the three pioneer papers (1-3) published in 1994, the micro/nanocantilever sensor technology had boomed and become a promising sensor technology. Microcantilever sensors have several advantages over many other sensor technologies, including faster response time, lower cost of fabrication, the possibility of sensor arrays with small overall dimensions, the ability to explore microenvironments, and improved portability for field applications. SEM pictures of microcantilevers are shown in Fig. (1). Microcantilevers are miniature diving boards that are micromachined from silicon or other materials. The length of these cantilevers is often in the range of 100-200 microns while the thickness ranges from 200 -1000 nm; Recent advances in micromachining cantilever beams that can detect extremely small forces and mechanical stresses promise to bring about a revolution in the field of chemical, physical, and biological sensor development.

Low-Noise Chemical Detection with a Piezoresistive Microcantilever Array

Simulation and Design of Piezoelectric Microcantilever Chemical Sensors

Chemical Sensors Based on Piezoresistive Cantilever Array

Mechanical and Electronic Approaches to Improve the Sensitivity of Microcantilever Sensors.

Chemical Specificity in Nanomechanical Sensors

Microcantilever Biosensors for Chemicals and Bioorganisms

A Sensor Platform Based On Piezoresistive Cantilever

Molecular Recognition of Chem/Biowarfare Agents Using Micromechanical Sensors

Detection of Ph Variation Using Modified Microcantilever Sensors

A Compact, Low-Power Cantilever-Based Sensor Array for Chemical Detection

Quad-cantilever microsensors with a low-cost single-sided micro-machining technique for trace chemical vapor detection

Nano-Thickness Integrated Resonant Cantilevers With Surface-Stiffening Scheme For Ultra-Sensitive Detection Of Trace Chemicals

A Low Spring Constant Piezoresistive Microcantilever for Biological Reagent Detection

A Novel Micro-cantilever Array Immunosensor Based on Piezoelectric Scanning

Biochemical Sensors Based on Piezoresistive Microcantilevers

Design and Testing of Single and Double Sided Cantilevers for Chemical Sensing

Chemical and Biological Sensors Based on Microcantilever Structure

Self-Excited Piezoelectric Microcantilever For Gas Detection

Silicon Dioxide Microcantilever With Piezoresistive Element Integrated For Portable Ultraresoluble Gaseous Detection

Nano-thick Resonant Cantilevers with a Novel Specific Reaction-Induced Frequency-Increase Effect for Ultra-Sensitive Chemical Detection