Investigation of electrical properties of contact between Molybdenum disulfide and different metals

fei lan,quan tao,guangyong li
DOI: https://doi.org/10.1109/NANO.2015.7388680
2015-01-01
Abstract:With growing interest in the application of molybdenum disulfide (MoS <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> ) into high performance transistors, understanding its contact with different metals is important. Improper MoS <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> /metal contact render the device high contact impedance, which leads to insufficient charge injection efficiency and as a result, bad device performance. In this study, to characterize electrical properties in MoS <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> /metal contact with commonly used metal: gold (Au), palladium (Pd), nickel (Ni) and titanium (Ti), Kelvin probe force microscopy (KPFM) is utilized to mapping the surface potential (SP) distribution in such contacts. It is concluded from the characterization results that band alignment between MoS <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> and different metals are not determined solely by band structure of MoS <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> and work function of the contact metals, instead, a special phenomenon--partial fermi level pinning appears in such contacts. Also, we notice that different metal processes considerable different topographical roughness, which may have great influence on the charge injection efficiency in the contacts.
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