Laser Plasma Source for Soft X-Ray Imaging in Ciom

ZX Shao,ZS Wang,FM Xu,JX Lu,XD Chen
DOI: https://doi.org/10.1117/12.290269
1997-01-01
Abstract:We previously reported 18 nm Schwartzchild microscope by using a laser plasma source. Now we are planning to improve our Nd:YAG laser system and the multilayers mirror of Mo/B4C instead of Mo/Si, for producing shorter wavelength radiation and developing a new soft x-ray imaging setup. To compress the pulse width of the laser, the SBS (Stimulated Brillouin Scattering) cells is available. To short the wavelength to the 4th harmonics of the laser with high as 0.4 J energy per pulse, the hindrance is the low, less than 20%, nonlinear conversion efficiency. In this paper we are going to briefly introduce the new method to overcome the hindrance and the configuration of the SBS cell.
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