Shallow Ohmic Contacts to N-Type GaAs and AlxGa1−xAs

LR ZHENG,SA WILSON,DJ LAWRENCE,SI RUDOLPH,S CHEN,G BRAUNSTEIN
DOI: https://doi.org/10.1063/1.106491
IF: 4
1992-01-01
Applied Physics Letters
Abstract:Sequential deposition of Pd/AuGe/Ag/Au and rapid thermal annealing are used to form shallow ohmic contacts to n-GaAs and n-AlxGa1−xAs. Ion backscattering measurements and cross-sectional transmission electron microscopy show limited metal-substrate reaction and uniform interfaces. The metallization on GaAs displays good electrical properties with a contact resistivity of 2.0×10−6 Ω cm2 at a carrier concentration of 2×1017 cm−3. The contacts formed on Al0.55Ga0.45As have a contact resistivity of 2.1×10−5 Ω cm2 at a carrier concentration of 7.5×1017 cm−3.
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