Stress Focusing For Controlled Fracture In Microelectromechanical Systems

matthew meitl,xue feng,jingyan dong,etienne menard,placid m ferreira,yonggang huang,john a rogers
DOI: https://doi.org/10.1063/1.2679072
IF: 4
2007-01-01
Applied Physics Letters
Abstract:This letter describes a strategy for controlling fracture in microelectromechanical systems (MEMSs) based on the control of corner sharpness. Studies of model MEMS structures with round (radius of approximately microns), intermediate, and sharp (< 10 nm) corners demonstrate the effects of corner sharpness on the concentration of applied stress. Finite-element analysis reveals that stress distributions intensify and localize as sharpness increases, and transfer printing experiments demonstrate the influence of stress concentration on breakability. (c) 2007 American Institute of Physics.
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