Abstract:We have previously demonstrated that two-photon induced polymerization allows fabrication of complex three-dimensional structures such as photonic crystals and micromachines with a spatial resolution around 120 nm. In this report, we show the resolution improvement till 65 nm. Experimentally, 780-nm femtosecond laser pulses were focused into a photopolymerizable resin by a high numerical aperture objective lens. The resin is polymerized by means of radical initiation. In the radical polymerization, oxygen molecules dissolved in the resin inhibit the polymerization reactions by scavenging the radicals that initiate the polymerization. At controlled laser pulse energy, the radicals can survive and initiate polymerization only at the region where exposure energy is larger than the polymerization threshold, leading to a sub-diffraction-limited spatial resolution. In order to further improve the fabrication accuracy, we introduced a radical quencher into the resin, and at an optimized concentration the lateral spatial resolution was improved to 100 nm. Moreover, we fabricated a suspended fiber connected between two anchors by controlling the exposure dose within the fiber. After removing the unsolidified resin by ethanol and drying, a 65-nm width fiber was obtained, suggesting a possible spatial resolution of similar dimension. The size less than 1/10 of the excitation wavelength could satisfy requirements of many photonic and optoelectronic devices.

Two-Photon Photoreduction Of Metallic Nanoparticle Gratings In A Polymer Matrix

High-resolution 3D Nanoprinting Based on Two-Step Absorption Via an Integrated Fiber-Coupled Laser Diode.

One-step Patterning of Sub-wavelength Plasmonic Gratings in Metal-Polymer Composites

Two-Dimensional Silver Structures Fabricated by Two-Photon Femtolaser

Two-Photon Polymerization of Gratings by Interference of A Femtosecond Laser Pulse

Metal Ion Reduction Induced by Femtolaser Two-Photon Absorption

Fabrication Of Nano-Grating Inside Transparent Materials By Using A Single Femtosecond Laser Beam

The Fabrication of Permanent Holographic Gratings in Bulk Polymer Medium by a Femtosecond Laser

Micro/nanofabrication of Two and Three Dimensional Structures by Two-Photon Polymerization

Generation and Formation of Gold Nanoparticles with Spatial Control by Two-Photon Femtosecond Laser Interference

Fabrication of Polymeric 3D Structure Containing Metal/metal Oxide Nanoparticles by Two-Photon Processes

Photofabrication of Periodic Microstructures in Azodye-Doped Polymers by Interference of Laser Beams

Reduction in Feature Size of Two-Photon Polymerization Using Scr500

Optical Microstructures Fabricated by Femtosecond Laser Two-Photon Polymerization

Rapid Sub-Diffraction-Limit Laser Micro/Nanoprocessing in A Threshold Material System

Photoinduced Permanent Gratings Inside Bulk Azodye-Doped Polymers By The Coherent Field Of A Femtosecond Laser

Two-photon polymerization of metal ions doped acrylate monomers and oligomers for three-dimensional structure fabrication

The study on spatial resolution in two-photon induced polymerization

Metal-nanoshelled three-dimensional photonic lattices.

Complex three-dimensional polymer-metal core-shell structures towards emission control.

Micrograting Polymerization Fabrication with a Single Femtosecond Laser Pulse at 400 Nm Wavelength