Reduction in Feature Size of Two-Photon Polymerization Using Scr500

Dengfeng Tan,Yan Li,Fengjie Qi,Hong Yang,Qihuang Gong,Xianzi Dong,Xuanming Duan

DOI: https://doi.org/10.1063/1.2535504

IF: 4

2007-01-01

Applied Physics Letters

Abstract:Fabricated by femtosecond laser pulses at wavelength λ of 780nm, the feature size of two-photon polymerization using SCR500 was reduced to λ∕50. Lines with sub-25-nm width were produced by controlling the incident laser power and the laser focus scan speed up to 700μm∕s. Based on repolymerization between two structures close to each other, the feature size was further reduced to ∼15nm, which demonstrated the potential for three-dimensional nanofabrication with high spatial resolution.