Ultrafast Lasers for Material Processing and Imaging at Miro/Nanoscales
Yong Feng Lu,Yun Shen Zhou,Wei Xiong,Li Jia Jiang,Xi Huang,Jean-Francois Silvain,Lan Jiang
2014-01-01
Abstract:The development of ultrafast lasers has provided tremendous opportunities for material processing and imaging. In this talk, the author will present their recently works in these areas, including additive and subtractive fabrication of three-dimensional (3D) mi- cro/nanostructures, laser direct writing of graphene patterns in ambient air, and 3D imaging of biomedical samples. Additive nanofabrication by two-photon polymerization (TPP) has recently drawn increased at- tention due to its sub-100nm resolution and truly 3D structuring capability. Besides additive processes, subtractive process is also indispensable for various 3D fabrications. In modern 3D micro/nanofabrication, the combination of both additive and subtractive fabrication steps is not only desired but also demanded. However, method possessing both additive and subtrac- tive fabrication capabilities was rarely reported. Recently, we developed a complementary 3D micro/nanofabrication process by integrating both additive two-photon polymerization (TPP) and subtractive multi-photon ablation (MPA) into a single platform of femtosecond-laser direct writing process. Functional device structures were successfully fabricated including: polymer flber Bragg gratings containing periodic holes of 500-nm diameter and 3D micro-∞uidic systems containing arrays of channels of 1-"m diameter. The integration of TPP and MPA processes enhances the micro/nanofabrication e-ciency and enables the fabrication of complex 3D mi- cro/nanostructures that are impractical to produce by either TPP or MPA alone. The new 3D micro/nanofabrication method is promising for a wide range of applications including integrated optics, metamaterials, microelectromechanical systems, and micro-∞uidics. Large-scale and high-quality graphene patterns on dielectric substrates have a wide range of promising application such as touch screen display, smart window, ∞exible solar cells, etc.. Cur- rent fabrication methods generally require close-chamber and high-temperature processes for the graphene synthesis plus a multi-step patterning process, which is costly and unsuitable for the industrial manufacturing. We have developed an additive nanofabrication method for fabricat- ing arbitrary graphene patterns at the ambient conditions. Open-air and room-temperature deposition of bi-layer graphene patterns on glass substrates has been achieved via a femtosec- ond laser direct wring process based on nickel/amorphous carbon (a-C) co-sputtered thin fllms. Arbitrary patterns of graphene lines can be formed directly on the glass substrates without ad- ditional graphene transfer steps. No vacuum and substrate heating are required in the graphene growth process. The formation of graphene in the laser direct writing process follows a solid- state transformation mechanism. Various graphene patterns, including texts, spirals, line arrays, and large-scale integrated circuit patterns, with a feature line width of 800nm, were successfully fabricated. The laser direct writing technique could provide an innovative, cost-efiective way to fabricate large-scale graphene patterns for future practical device applications. Broadband coherent anti-Stokes Raman spectroscopy (CARS) and microscopy system based on a photonic crystal flber light source has been used to study biological and medical samples. The pump pulses have a narrow bandwidth and deflne the spectral resolution. The Stokes pulses are spectrally broad in 700{1100nm. The pump and Stokes pulses excite multiple Raman transitions within the bandwidth of the Stokes pulses. Vibrationally excited states are probed with a third spectrally narrow probe pulse, usually the same as the pump pulse. In a single shot, the entire CARS spectrum of the excited states is generated. Both the pump and Stokes beams are provided by a single fs laser in conjunction with a supercontinuum generator, which is optimized for performing broadband CARS microscopy. The supercontinuum ensures that broadband anti-Stokes spectra can be obtained without tuning the laser wavelength. The CARS