Structural and Morphologic Evolution of Pt/Ba0.7sr0.3tio3/Pt Capacitors with Annealing Processes

YL Qin,CL Jia,K Urban,R Liedtke,R Waser
DOI: https://doi.org/10.1063/1.1469683
IF: 4
2002-01-01
Applied Physics Letters
Abstract:The microstructure and chemistry of the as-grown, the postannealed and the forming-gas-atmosphere-treated Pt/Ba0.7Sr0.3TiO3/Pt capacitors are studied by means of high-resolution transmission electron microscopy and energy-disperse x-ray spectroscopy. It is found that the annealed Ba0.7Sr0.3TiO3 films have larger grain size and more smooth top film-electrode interfaces. High-resolution images reveal the presence of disordered or amorphous regions at the interfaces in the Ba0.7Sr0.3TiO3 film heated in the forming-gas atmosphere. These regions show a higher Ti/(Ba+Sr) ratio than the grain matrix. The effects of these amorphous regions on the electrical properties of Ba0.7Sr0.3TiO3 films are discussed.
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