Controlling Young’s Modulus of Polymerized Structures Fabricated by Direct Laser Writing

Shi-Jie Zhang,Yan Li,Yang-Kai Wang,Li-Pu Liu,Hong-Da Wang,Yun-Feng Xiao,Hong Yang,Qihuang Gong
DOI: https://doi.org/10.1007/s00339-014-8787-3
2014-01-01
Applied Physics A
Abstract:We demonstrate that Young’s modulus of polymerized microstructures in both air and liquid can be controlled by changing the writing velocity of the femtosecond laser two-photon polymerization, which is crucial for many practical applications. For the zirconium/silicon inorganic/organic hybrid sol–gel, the Young’s modulus for dry polymerized micro-cantilevers in air can be adjusted from 5.5 to 9.4 GPa by varying writing velocity from 600 to 200 μm/s, and it also can be controlled in liquid, which is four orders smaller than in air. To characterize the Young’s modulus in liquid, we propose a simple method by measuring non-adhered lengths of the arc-shaped or s-shaped polymerized micro-cantilevers after drying in air.
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