Direct Laser Writing of Whispering Gallery Microcavities by Two-Photon Polymerization

Zhao-Pei Liu,Yan Li,Yun-Feng Xiao,Bei-Bei Li,Xue-Feng Jiang,Yi Qin,Xiao-Bo Feng,Hong Yang,Qihuang Gong
DOI: https://doi.org/10.1063/1.3517493
IF: 4
2010-01-01
Applied Physics Letters
Abstract:We demonstrate that high-Q polymer whispering gallery microcavities can be directly written by the two-photon polymerization of zirconium/silicon hybrid sol-gel, benefiting from the high spatial resolution and three-dimensional nature of this direct laser writing technique. The quality factors of the fabricated whispering gallery microcavities are up to 1.48×105 limited by the material absorption. The surface roughness is less than 12 nm. This opens the way to fabricate intricate three-dimensional microcavities for the fundamental and applied physics research based on optical resonators.
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