Effects of Heat Treatments on Aluminum Oxide Coatings Deposited on Ni-Based Alloy

Xiufeng Tang,Fa Luo,Chunhan Hseih,Xiangyu Li
DOI: https://doi.org/10.1142/s0218625x1550016x
2015-01-01
Surface Review and Letters
Abstract:Al x O y films coated on both Ni -based superalloy and silica substrates were prepared by DC reactive magnetron sputtering. Post-deposition annealing was carried out on those as-deposited films. And then 1 h heat treatments were done on the annealed films at constant temperatures ranging from 600–900°C to simulate the high-temperature application. The Al x O y film heated at 600°C exhibited good film property. Bonding strength between the 600°C-heated Al x O y film and the Ni -based substrate was about 11.6 MPa.
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