Cryogenic Motion Performances Of A Piezoelectric Single Crystal Micromotor

xiaotian li,yuting wu,zhijiang chen,xiaoyong wei,haosu luo,shuxiang dong
DOI: https://doi.org/10.1063/1.4870947
IF: 2.877
2014-01-01
Journal of Applied Physics
Abstract:This study investigates the cryogenic performances of a millimeter-size piezoelectric ultrasonic linear micromotor. The piezoelectric vibrator of the micromotor is made of Pb(In1/2Nb1/2)O-3 -Pb(Mg1/3Nb2/3)-PbTiO3 single crystal and operated in first-bending wobbling mode. Experiments show that the piezoelectric single crystal micromotor works effectively even at extremely low temperature of -175 degrees C, although its resonance peaks vary with temperature significantly. This work confirms the feasibility of cryogenic operation of the piezo-micromotor, which is meaningful for aerospace or superconducting microwave application. (C) 2014 AIP Publishing LLC.
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