Abstract:Atomic force microscopy (AFM) tip-based nanofabrication is as a powerful method to machine nanostructures. However, the traditional AFM scratching process suffers from low processing efficiency and a low rate of material removal. Thus, an AFM tip-based nanomilling method was previously proposed to improve the machining efficiency and material removal rate; however, the machining mechanism of the nanomilling process, especially on hard-brittle silicon crystals, is not well understood. In this study, we used an AFM tip-based nanomilling approach to machine nanochannels on single-crystal silicon to investigate the machining mechanism (i.e., the material removal state, undeformed chip thickness, the brittle-to-ductile transition, and subsurface damage). For the first time, we established a theoretical model for tip-based nanomilling with a constant normal load to predict the machined depth. Nanochannels fabricated with a wide range of feed directions, crystal orientations, and tip trajectories were obtained, which provided a reference for machining high-quality nanochannels and an in-depth understanding of the nanomilling of single-crystal silicon. The experimental results demonstrated that we could machine a nanochannel without pile-ups by selecting a specific trajectory with a feed smaller than 4 nm in the 0 degrees direction, a normal load no greater than 120 mu N, and a crystal orientation at rotation angles of 135 degrees, 157.5 degrees, or 180 degrees. Moreover, transmission electron microscope analysis of the subsurface of the nanochannel revealed a large number of dislocations, stacking faults, and a layer of amorphous silicon. Our findings are of great significance for obtaining high-quality nanochannels with a predicable machined depth and understanding the nanomilling mechanism of hard-brittle materials.

Multiscale Modeling and Experimental Validation for Nanochannel Depth Control in Atomic Force Microscopy-Based Nanofabrication

Modelling and experimental study of machined depth in AFM-based milling of nanochannels

A Novel Approach for Determining the Minimum Feed in Nanochannels Processing Via Molecular Dynamics Simulation

Fabrication of Nanochannels with Complex Three-Dimensional Structures Based on a Modified Atomic Force Microscopy Nanoscratching System

Towards Understanding the Machining Mechanism of the Atomic Force Microscopy Tip-Based Nanomilling Process

AFM Tip-Based Fabrication of Silicon Nanostructures with Reduced Subsurface Amorphous Layers

Automated Nanomanipulation with Afm by Using L-1 Adaptive Controller

Nanomanipulation Using Atomic Force Microscope with Drift Compensation.

Atomic Force Microscope-Based Nanomanipulation with Drift Compensation

Fabrication of millimeter scale nanochannels using the AFM tip-based nanomachining method

Multi-scale Numerical Analysis and Experimental Verification for Nano-Cutting

Nano-fabrication System Based on Atomic Force Microscopy

Study on Material Removal for Nanochannels Fabrication Using Atomic Force Microscopy Tip-Based Nanomilling Approach

Machining complex three-dimensional nanostructures with an atomic force microscope through the frequency control of the tip reciprocating motions

Fabrication of Nanochannels with Ladder Nanostructure at the Bottom Using AFM Nanoscratching Method

Multiscale CFD modelling for conformal atomic layer deposition in high aspect ratio nanostructures

Micro-mechanical Analysis of Dynamic Processes of Nanomanipulation

Multiscale simulation on nanometric cutting of single crystal copper

Molecular Dynamics Simulations of Ripple Nanostructure Formation During Nanomachining Via Atomic Force Microscopy

Unification of Face-Centered-Cubic Crystalline Material Removal Mechanisms in Microscale and Nanoscale Single-Point Machining

Fabrication of Large Scale Nanostructures Based on a Modified Atomic Force Microscope Nanomechanical Machining System.