Abstract:During the fabricating procedure of optical elements, computer-controlled tools will introduce some periodic structured errors, named mid-spatial frequency errors, which may scatter the laser beams, create filamentous spots or even damage the optical components in Inertial Confinement Fusion (ICF) high power laser system. Transverse translation diverse phase retrieval (TTDPR) is an ingenious phase retrieval method for measuring aspheric and freeform surfaces. In this paper, we explore the measurement of optical elements with mid-spatial frequency errors by using TTDPR. First, we briefly introduce the features of mid-spatial frequency errors and establish the relation between mid-spatial frequency errors and diffraction pattern. Second, with the knowledge of the mid-spatial frequency error, we analyze the feasibility of optical elements with mid-spatial frequency error measurement by using TTDPR. In order to improve the convergence and measurement accuracy of phase retrieval algorithm, initial inputs are optimized for the following iterative phase retrieval algorithm. Results indicate that a 50% higher reconstruction accuracy can be achieved, when the initial input is the ideal lens to recover the phase of lens with mid-spatial frequency errors. For TTDPR, sub-aperture illuminated with overlapping part among adjacent sub-apertures will improve accuracy of iterative phase algorithm than never overlapped sub-aperture, while it encumbers the efficiency of iterative phase retrieval algorithm. Based on the characteristics of the particular optical surfaces, the influence of major parameter of sub-aperture including the size of sub-aperture and the overlapped proportion among adjacent sub-aperture to accuracy and efficiency of TTDPR are also discussed.

Fabrication Error Analysis for Diffractive Optical Elements Used in A Lithography Illumination System

Optimization of Transverse Translation Diverse Phase Retrieval for Optical Elements with Mid-Spatial Frequency Errors

Alignment Methods for Micron-Scale Surface Defects Automatic Evaluation of Large-Aperture Fine Optics

Distortion Correction in Surface Defects Evaluating System of Large Fine Optics

Influences of Misalignment Errors of Optical Components in an Orthogonal Two-Axis Lloyd's Mirror Interferometer.

Error Analysis of Spherical Scanning Mechanism Used for Surface Defects Detection

Effects of Fabrication Errors on MTF and Diffraction Efficiency for Binary Optical Lens

End-to-End Design of Diffractive Optical Elements Fabricated by Direct Laser Writing Lithography

Freeform Lens Arrays For Off-Axis Illumination In An Optical Lithography System

Designing Diffractive Optical Elements for Special Functions Using a Rigorous Method

Fabrication-error Analysis of Injection-Molded Aspheric Elements Using Typical Aberration Terms in Transmitted Wavefront with Shack–Hartmann Wavefront-Sensing Measurement

Freeform lens for off-axis illumination in optical lithography system

Research On A New Approach For The Fabrication Of Diffractive Optical Elements By Means Of Rotating Digital Mask

Impact of fabrication errors and refractive index on multilevel diffractive lens performance

Diffraction Analysis of Sidelobe Characteristics of Optical Elements with Ripple Error

Air Flow Turbulence Orthogonality and Surface Error Estimation in Large Aperture Optical Testing

Role of Fabrication Errors and Refractive Index on Multilevel Diffractive Lens Performance

Rigorous Electromagnetic Design of Finite-Aperture Diffractive Optical Elements by Use of an Iterative Optimization Algorithm

Design And Simulation Of Double Annular Illumination Mode For Micro-Lithography

Method of Pupil Shaping for Off-Axis Illumination in Optical Lithography

Fabrication-Aware Inverse Design For Shape Optimization