A. Amato,M. Bazzan,G. Cagnoli,M. Canepa,M. Coulon,J. Degallaix,N. Demos,M. Evans,F. Fabrizi,G. Favaro,D. Forest,S. Gras,D. Hofman,A. Lemaitre,G. Maggioni,M. Magnozzi,V. Martinez,L. Mereni,C. Michel,V. Milotti,M. Montani,A. Paolone,A. Pereira,F. Piergiovanni,V. Pierro,L. Pinard,I. M. Pinto,E. Placidi,S. Samandari,B. Sassolas,N. Shcheblanov,J. Teillon,I. Vickridge,M. Granata

Abstract:Brownian thermal noise of thin-film coatings is a fundamental limit for high-precision experiments based on optical resonators such as gravitational-wave interferometers. Here we present the results of a research activity aiming to develop lower-noise ion-beam sputtered silicon nitride thin films compliant with the very stringent requirements on optical loss of gravitational-wave interferometers. In order to test the hypothesis of a correlation between the synthesis conditions of the films and their elemental composition and optical and mechanical properties, we varied the voltage, current intensity and composition of the sputtering ion beam, and we performed a broad campaign of characterizations. While the refractive index was found to monotonically depend on the beam voltage and linearly vary with the N/Si ratio, the optical absorption appeared to be strongly sensitive to other factors, as yet unidentified. However, by systematically varying the deposition parameters, an optimal working point was found. Thus we show that the loss angle and extinction coefficient of our thin films can be as low as $(1.0 \pm 0.1) \times 10^{-4}$ rad at $\sim$2.8 kHz and $(6.4 \pm 0.2) \times 10^{-6}$ at 1064 nm, respectively, after thermal treatment at 900 $^{\circ}$C. Such loss angle value is the lowest ever measured on this class of thin films. We then used our silicon nitride thin films to design and produce a multi-material mirror coating showing a thermal noise amplitude of $(10.3 \pm 0.2) \times 10^{-18}$ m Hz$^{-1/2}$ at 100 Hz, which is 25\% lower than in current mirror coatings of the Advanced LIGO and Advanced Virgo interferometers, and an optical absorption as low as $(1.9 \pm 0.2)$ parts per million at 1064 nm.

The Thermal Noise Limit to the Virgo Sensitivity

The VIRGO Project: A wide band antenna for gravitational wave detection

Upper-limit on the Advanced Virgo output mode cleaner cavity length noise

VIRGO Newtonian-noise reassessment

Suspensions Thermal Noise in the LIGO Gravitational Wave Detector

Development of ion-beam sputtered silicon nitride thin films for low-noise mirror coatings of gravitational-wave detectors

Thermal defocus-free Hartmann Wavefront Sensors for monitoring aberrations in Advanced Virgo

Thermo-optic noise in coated mirrors for high-precision optical measurements

Titania Mixed with Silica: A Low Thermal-Noise Coating Material for Gravitational-Wave Detectors

Low temperature mechanical dissipation of an ion-beam sputtered silica film

Mirror thermal noise in laser interferometer gravitational wave detectors operating at room and cryogenic temperature

Thermal Noise Reduction and Absorption Optimisation via Multi-Material Coatings

Photothermal and thermo-refractive effects in high reflectivity mirrors at room and cryogenic temperature

Excess noise and photo-induced effects in highly reflective crystalline mirror coatings

Angular control noise in Advanced Virgo and implications for the Einstein Telescope

Optical and mechanical properties of ion-beam-sputtered Nb$_2$O$_5$ and TiO$_2$-Nb$_2$O$_5$ thin films for gravitational-wave interferometers

Progress in the measurement and reduction of thermal noise in optical coatings for gravitational-wave detectors

Design and implementation of a seismic Newtonian noise cancellation system for the Virgo gravitational-wave detector

Characterization of the seismic field at Virgo and improved estimates of Newtonian-noise suppression by recesses

Fundamental thermal noise limits for optical microcavities

Enhanced sensitivity of sub-THz thermomechanical bolometers exploiting vibrational nonlinearity