Measurement of Step Height Using White Light Spectral Interferometry

Tong Guo,Lian Feng Ni,Long Ma,Jin Ping Chen,Xing Fu,Xiao Tang Hu

DOI: https://doi.org/10.4028/www.scientific.net/kem.625.326

2014-01-01

Key Engineering Materials

Abstract:The development of micro-nanomanufacturing technology leads to higher requirement for measurement technology, which gives birth to the ultra-precision measurement technology. As a kind of low coherence interferometry technology, spectral interferometry has been proposed. In this paper, the theory and system of white light spectral interferometry were described in detail, and the measurement principle of micro-structure was analyzed. The spectral interference signal was recorded and the phase information was retrieved from it by using five-step phase shifting algorithm, which includes the phase change on reflection from the stucture. So the optical path difference (OPD) can be obtained, which represents the height information. Three methods including slope method, single wavelength method and least square method were discussed based on the theory deduction and the experimental analysis. A step height standard was measured and the results show that this method has a good accuracy.