Abstract:Through-mask electrodeposition (TM-ECD) is a widely-used technique for manufacturing mesoscale and microscale precision metal features and components in a mass-production manner. However, in most cases, the traditional TM-ECD processes are very hard to fabricate high-accuracy multiscale (macroscale, mesoscale, microscale) features simultaneously due to the inherent nonuniform distribution of the applied energy fields including electric field, mass transportation field, and temperature field during electrodeposition. Furthermore, nanocrystalline microstructures have not been realized by TM-ECD without additional nonmetallic additives or mechanical stirring. Here, a ultrafine anode scanning through-mask electrodeposition (UASTM-ECD) process operated at DC mode is developed to further trigger the formation of nanocrystalline without additives, in which a ultrafine wire-shaped inert anode embedded in a stirring paddle reciprocates over the top surfaces of the through-masks with a spacing of less than 100 μm. Experimental investigations into this unique TM-ECD were systemically carried out by examining the geometrical profile, surface morphologies, forming accuracy, grain size, and mechanical properties of the fabricated nanocrystalline structures and components. Our findings showed that the UASTM-ECD can facilitate to achieve a significantly improved thickness distribution uniformity and considerably fine nanocrystalline ultrapure microscale and mesoscale complex cross-sectional arrays components over the traditional TM-ECD processes even though the multiscale features and components are simultaneously deposited on the same substrate. These result from the unique deposition manner of the UASTM-ECD in which the metal materials are intermittently filled into the patterned photoresist cavity molds very locally and at the extremely high current densities. This versatile approach eliminates the possible contamination by additives and integration difficulty of mechanical stirring, which can be used to fabricate the multiscale ultrahigh strength and high accuracy ultrapure nanostructured-material features.

Electrodeposition-Based Controllabe Fabrication of Novel Pd Nanotextured Microelectrodes

Development of Research on Fabrication of Nanometer-spaced Electrodes

Tailoring the Edge Sites of 2D Pd Nanostructures with Different Fractal Dimensions for Enhanced Electrocatalytic Performance.

Engineering Porosity into Trimetallic PtPdNi Nanospheres for Enhanced Electrocatalytic Oxygen Reduction Activity

Shape-controlled fabrication of platinum electrocatalyst by pulse electrodeposition

Fabrication of Metal Nanoelectrodes by Interfacial Reactions

Electrochemical Approach for Fabricating Nanogap Electrodes with Well Controllable Separation

Facile Fabrication Of Ultrathin Pt Overlayers Onto Nanoporous Metal Membranes Via Repeated Cu Upd And In Situ Redox Replacement Reaction

Fabrication and Electrochemical Properties of Novel Nanoporous Platinum Network Electrodes

Electrochemical Fabrication and Reactivation of Nanoporous Gold with Abundant Surface Steps for CO 2 Reduction

Highly-facile template-based selective electroless metallization of micro- and nanopatterns for plastic electronics and plasmonics

A New Approach of Electrochemical Etching Fabrication Based on Drop-off-delay Control

Fabrication, microstructure and electrocatalytic property of novel nanoporous palladium composites

Controllably Constructing Gold Nanostructures on Electrodes Through Growth of Zinc Oxide Nanorods and Two-Step Electroplating

Electrochemically Activated Surface Reconstruction of PdCu Nanotubes for Improved Ethanol Oxidation Electrocatalysis

Selective Electroless Metallization of Micro- and Nanopatterns via Poly(dopamine) Modification and Palladium Nanoparticle Catalysis for Flexible and Stretchable Electronic Applications.

Fabrication and Application of Nanometer-sized Metal Electrodes in Electroanalytical Measurements

Fabrication of Nanometer-Sized Electrodes and Tips for Scanning Electrochemical Microscopy.

Surface functionalization and shape tuning of carbon fiber monofilament via direct microplasma scanning for ultramicroelectrode application

Fabrication of nanopatterned metal layers on silicon by nanoindentation / nanoscratching and electrodeposition

Additive manufacturing multiscale ultrahigh strength and high accuracy nanocrystalline nickel stuructures and components using ultrafine anode scanning through-mask electrodeposition