Site Selective Doping of Ultrathin Metal Dichalcogenides by Laser‐Assisted Reaction

Eunpa Kim,Changhyun Ko,Kyunghoon Kim,Yabin Chen,Joonki Suh,Sang-Gil Ryu,Kedi Wu,Xiuqing Meng,Aslihan Suslu,Sefaattin Tongay,Junqiao Wu,Costas P. Grigoropoulos
DOI: https://doi.org/10.1002/adma.201503945
IF: 29.4
2016-01-01
Advanced Materials
Abstract:Laser-assisted phosphorus doping is demonstrated on ultrathin transition-metal dichalcogenides (TMDCs) including n-type MoS2 and p-type WSe2 . Temporal and spatial control of the doping is achieved by varying the laser irradiation power and time, demonstrating wide tunability and high site selectivity with high stability. The laser-assisted doping method may enable a new avenue for functionalizing TMDCs for customized nanodevice applications.
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