Abstract:We demonstrate a novel transmission color filter design that exploits both dielectric and plasmonic resonances to establish a highly color-selective device, reaching an experimental full-width at half-maximum (fwhm) that is only half that of previously demonstrated cost-effective color filter devices for the same peak transmission and better out-of-band rejection. The measured fwhm is only 25 nm, and the peak transmission reaches up to 53%. The filter uses the interference of Fabry-Pérot resonances and guided-mode resonances in two separated dielectric slabs to achieve this excellent fwhm while relying on propagating surface plasmon polaritons to achieve the excellent out-of-band rejection. A simulation study elucidates the nature of the optical modes in the device and their interference mechanisms and reveals the most important design considerations. Fabrication was done in a CMOS pilot line and is cost-effective, as it requires only two metal patterning steps. Fabrication imperfections are discussed, together with strategies to mitigate them. We show the correct mitigation of these imperfections leads to further performance gain, enabling a full-width at half-maximum down to 20 nm and a peak transmission beyond 60%. We believe this novel filter design is a powerful concept to improve the spectral resolution of color filters for cost-effective multispectral imaging. Beyond multispectral imaging, the design could be adapted for other applications that require on-chip spectral filtering in a thin form factor.The Supporting Information is available free of charge at https://pubs.acs.org/doi/10.1021/acsphotonics.1c01983.Table with dimensions of optimized unit cell designs for different pitches; Transfer matrix method applied to separate SiN sections to isolate Fabry-Pérot resonances; Simulated and measured transmission spectra for the orthogonal polarization (electric field parallel with the grating lines); Simulated transmission spectra for nonzero angle of incidence; Refractive index and extinction coefficient extracted from ellipsometry measurement (PDF)This article has not yet been cited by other publications.

Angle-Insensitive Plasmonic Color Filters with Randomly Distributed Silver Nanodisks

Angle Robust Reflection/Transmission Plasmonic Filters Using Ultrathin Metal Patch Array

Highly Efficient Omnidirectional Structural Color Tuning Method Based on Dielectric-Metal-dielectric Structure.

Angle Independent Plasmonic Circular Polarizers

Plasmonic Reflection Color Filters with Metallic Random Nanostructures

Polarization-independent Plasmonic Subtractive Color Filtering in Ultrathin Ag Nanodisks with High Transmission.

Design and simulation of omnidirectional reflective color filters based on metal-dielectric-metal structure.

Plasmonic Nanoresonators for High-Resolution Colour Filtering and Spectral Imaging.

High-transmission Polarization-Dependent Active Plasmonic Color Filters

Aperiodic Nanoplasmonic Devices for Directional Colour Filtering and Sensing

Aperiodic Single-Pixel Angle-Modulated Plasmonic Color Sorter and Angle Sensor

Highly Selective Color Filters Based on Hybrid Plasmonic–Dielectric Nanostructures

Plasmonic Color Filter Based on Rectangular Metal Block Array Structure

Nanostructured Metal-Insulator-metal Resonators for High-Resolution Color Filtering and Spectral Imaging

Panchromatic plasmonic color patterns: From embedded Ag nanohole arrays to elevated Ag nanohole arrays

Design of a Double Grating-Coupled Surface Plasmon Color Filter

Plasmonic Color Filter Based on a Hetero-Metal-insulator-metal Grating.

Angle-tolerant polarization tunable expanded reflected plasmonic color palettes

High-transmission rotation-angle-dependent plasmonic color filter

Incident Angle Dependent Color Filter and Polarizer by Comprehensive Surface Plasmon Resonances on Bilayer Silver Nanowire Gratings

Ultrathin Metallic Subtractive Color Filters Based on Surface Plasmon Primitives