Abstract:Micro parts with high aspect ratios have been widely used in different fields including aerospace and defense industries, while the dimensional measurement of these micro parts becomes a challenge in the field of precision measurement and instrument. To deal with this contradiction, several probes for the micro parts precision measurement have been proposed by researchers in Center of Ultra-precision Optoelectronic Instrument (UOI), Harbin Institute of Technology (HIT). In this paper, optical fiber probes with structures of spherical coupling(SC) with double optical fibers, micro focal-length collimation (MFL-collimation) and fiber Bragg grating (FBG) are described in detail. After introducing the sensing principles, both advantages and disadvantages of these probes are analyzed respectively. In order to improve the performances of these probes, several approaches are proposed. A two-dimensional orthogonal path arrangement is propounded to enhance the dimensional measurement ability of MFL-collimation probes, while a high resolution and response speed interrogation method based on differential method is used to improve the accuracy and dynamic characteristics of the FBG probes. The experiments for these special structural fiber probes are given with a focus on the characteristics of these probes, and engineering applications will also be presented to prove the availability of them. In order to improve the accuracy and the instantaneity of the engineering applications, several techniques are used in probe integration. The effectiveness of these fiber probes were therefore verified through both the analysis and experiments.

Three-dimensional Fiber Probe Based on Micro Focal-Length Collimation and a Fiber Bragg Grating for the Measurement of Micro Parts.

A 3D fiber probe based on orthogonal micro focal-length collimation and fiber Bragg grating

Double Fiber Probe with a Single Fiber Bragg Grating Based on the Capillary-Driven Self-Assembly Fabrication Method for Dimensional Measurement of Micro Parts.

Fiber Deflection Probing Method Based on Micro Focal-Length Collimation

Investigation Of A Three-Dimensional Micro-Scale Sensing System Based On A Tapered Self-Assembly Four-Cores Fiber Bragg Grating Probe

Development of Fbg Probes for Dimensional Metrology with Micro Parts of High Aspect Ratio

A Twin Fiber Bragg Grating Probe for the Dimensional Measurement of Microholes

Dimensional Measurement of Micro Parts with High Aspect Ratio in Hit-Uoi

Assembled Cantilever Fiber Touch Trigger Probe for Three-Dimensional Measurement of Microstructures.

Development of a Double Fiber Probe with a Single Fiber Bragg Grating for Dimensional Measurement of Microholes with High Aspect Ratios

Optical Fiber Probe Based On Spherical Coupling Of Light Energy For Inner-Dimension Measurement Of Microstructures With High Aspect Ratios

Four-Cores FBG Probe Based on Capillary Self-Assembly Fabrication Technique for 3D Measurement

A Fiber-Based Chromatic Dispersion Probe for Simultaneous Measurement of Dual-Axis Absolute and Relative Displacement

A Tapered Fourcores Phase-Shift FBG Probe for Three-Dimensional Micro-Scale Measurement

Fiber Probe for Micro-Hole Measurement Based on Detection of Returning Light Energy

Microstructured Cantilever Probe on Optical Fiber Tip for Microforce Sensor

A Twin FBG Probe and Integration with a Microhole-Measuring Machine for the Measurement of Microholes of High Aspect Ratios

Analysis and Design of Fiber Microprobe Displacement Sensors Including Collimated Type and Convergent Type for Ultra-Precision Displacement Measurement

A Fiber-Based Chromatic Dispersion Probe for Simultaneous Measurement of X-Axis and Z-Axis Displacements with Nanometric Resolutions

Three-Dimensional Magnetic Field Vector Measurement Using Fiber Mounted Magneto-Optic Probe

A dual-probe three-dimensional profile measurement system