Abstract:Micro parts with high aspect ratios have been widely used in different fields including aerospace and defense industries, while the dimensional measurement of these micro parts becomes a challenge in the field of precision measurement and instrument. To deal with this contradiction, several probes for the micro parts precision measurement have been proposed by researchers in Center of Ultra-precision Optoelectronic Instrument (UOI), Harbin Institute of Technology (HIT). In this paper, optical fiber probes with structures of spherical coupling(SC) with double optical fibers, micro focal-length collimation (MFL-collimation) and fiber Bragg grating (FBG) are described in detail. After introducing the sensing principles, both advantages and disadvantages of these probes are analyzed respectively. In order to improve the performances of these probes, several approaches are proposed. A two-dimensional orthogonal path arrangement is propounded to enhance the dimensional measurement ability of MFL-collimation probes, while a high resolution and response speed interrogation method based on differential method is used to improve the accuracy and dynamic characteristics of the FBG probes. The experiments for these special structural fiber probes are given with a focus on the characteristics of these probes, and engineering applications will also be presented to prove the availability of them. In order to improve the accuracy and the instantaneity of the engineering applications, several techniques are used in probe integration. The effectiveness of these fiber probes were therefore verified through both the analysis and experiments.

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Optical Fiber Probe Based On Spherical Coupling Of Light Energy For Inner-Dimension Measurement Of Microstructures With High Aspect Ratios

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A 3D fiber probe based on orthogonal micro focal-length collimation and fiber Bragg grating

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A Fiber-Based Chromatic Dispersion Probe for Simultaneous Measurement of Dual-Axis Absolute and Relative Displacement

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Spherical Coupling Probe for Measuring Inner Dimensions of Microstructures.

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Fiber probe based on dispersive interferometry with an improved demodulation algorithm

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Subpixel Edge Location Method Proposed to Improve the Performance of Optical Fiber Spherical Coupling Probe During Dimensional Measurement of Micro-Cavities with High Aspect Ratio

A Twin Fiber Bragg Grating Probe for the Dimensional Measurement of Microholes

Double Fiber Probe with a Single Fiber Bragg Grating Based on the Capillary-Driven Self-Assembly Fabrication Method for Dimensional Measurement of Micro Parts.

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Measurement of micro-cavity dimension by double optical fiber coupler based on OFMM's location