Abstract:High quality (Q) factor microdisks are fundamental building blocks of on-chip integrated photonic circuits and biological sensors. The resonant modes in microdisks circulate near their boundaries, making their performances strongly dependent upon surface roughness. Surface-tension-induced microspheres and microtoroids are superior to other dielectric microdisks when comparing Q factors. However, most photonic materials such as silicon and negative photoresists are hard to be reflowed and thus the realizations of high-Q microdisks are strongly dependent on electron-beam lithography. Herein, we demonstrate a robust, cost-effective, and highly reproducible technique to fabricate ultrahigh-Q microdisks. By using silica microtoroids as masks, we have successfully replicated their ultrasmooth boundaries in a photoresist via anisotropic dry etching. The experimentally recorded Q factors of passive microdisks can be as large as 1.5 × 106. Similarly, ultrahigh Q microdisk lasers have also been replicated in dye-doped polymeric films. The laser linewidth is only 8 pm, which is limited by the spectrometer and is much narrower than that in previous reports. Meanwhile, high-Q deformed microdisks have also been fabricated by controlling the shape of microtoroids, making the internal ray dynamics and external directional laser emissions controllable. Interestingly, this technique also applies to other materials. Silicon microdisks with Q > 106 have been experimentally demonstrated with a similar process. We believe this research will be important for the advances of high-Q micro-resonators and their applications.

Deformed Microdisk-Based End-Fire Injection and Collection Resonant Device

Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

Strong Nonlinear Optics In On-Chip Coupled Lithium Niobate Microdisk Photonic Molecules

Simultaneous generation of four-wave mixing and stimulated Raman scattering in coupled lithium niobate microdisks mediated by second harmonic generation

Toward On-Chip Unidirectional and Single-Mode Polymer Microlaser

Broadband Highly Efficient Nonlinear Optical Processes in On-Chip Integrated Lithium Niobate Microdisk Resonators of Q-factor above 108

End-fire injection of guided light into optical microcavity

A Compact Photonic Microwave Receiver Integrated with Dielectric Resonator Antenna

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

High-Q and highly reproducible microdisks and microlasers.

On-chip Microwave Signal Generation Based on a Silicon Microring Modulator.

Modeling And Analysis Of Silicon-On-Insulator Elliptical Microring Resonators For Future High-Density Integrated Photonic Circuits

Phase Matched Second Harmonic Generation in an On-Chip Lithium Niobate Microresonator Fabricated by Femtosecond Laser

Whispering-gallery-mode Microdisk Lasers Produced by Femtosecond Laser Direct Writing

Bridging Ultrahigh-Q Devices and Photonic Circuits

The Ingaalp Quantum Well Microcavities Of Circular Or Deformed Disks And Disks With Microstructures

Chip‐Scale Mass Manufacturable High‐Q Silicon Microdisks

Photonic Damascene Process for Integrated High-Q Microresonator Based Nonlinear Photonics

High-Q Chaotic Lithium Niobate Microdisk Cavity

Bridging ultra-high-Q devices and photonic circuits

Controlled Self-Assembly of Organic Composite Microdisks for Efficient Output Coupling of Whispering-Gallery-Mode Lasers