Abstract:Flexible integrated circuits, working as the core unit of information processing, have been a subject of extensive research; they are essential to realize fully flexible electronic systems, which possess advantages over the current hybrid flexible systems (part or all based on rigid silicon chips) because of their extended application forms, better adaptability, and greater ability to operate at biotic/abiotic interfaces. To a great extent, the deliverable functionality of the ultimate integrated system is determined by the information handling capability of flexible integrated circuits, which is highly dependent on their performance and integration scale. Additionally, as the applications of flexible electronic systems become increasingly favorable in portable, wearable, or remote forms with a restrained power supply, the power dissipation of flexible integrated circuits becomes crucial, as they consume considerable energy in a system. Due to the restricted fabrication circumstances on flexible substrates with a low thermal budget and complex working environments (from the perspectives of both mechanical and electrical conditions), pursuing flexible integrated circuits with high performance, decent integration scale, and low power consumption is very challenging, but it is necessary for advanced, fully flexible systems. Other characteristics, such as biocompatibility, degradability, and configurability, would add value to flexible integrated circuits and introduce unconventional forms and new deliverables for flexible electronics. In this Account, we summarize our efforts toward developing carbon nanotube-based flexible integrated circuits over the past five years. As promising candidates for constructing next-generation chips, carbon nanotube-based integrated circuits have demonstrated their superiority in performance and power consumption, and we extend these advancements to a flexible form through material optimization, device design, processing technology development, etc. We start with a brief introduction to carbon nanotube properties to reveal their intrinsic advantages as channel materials for next-generation electronics. Next, we discuss the manufacturing methods we developed to construct integrated circuits on flexible substrates via a direct fabrication or transfer process to maintain these advantages and fit the circuits to different application circumstances. Then, demonstrations of carbon nanotube-based flexible integrated circuits with different forms and characteristics are presented, including (1) the implantation of complementary metal-oxide-semiconductor circuits on ultrathin substrates with high performance, (2) transferrable integrated circuits with a biointegration capability and low power consumption, (3) degradable integrated circuits manufactured at the wafer scale with a high yield and high uniformity, and (4) configurable integrated circuits with multiple functions. Integrated flexible sensor systems constructed with some of these circuits have also been introduced. Finally, we end the Account with an overview of the remaining challenges and new opportunities that have been opened up for carbon nanotubes in flexible integrated circuits and new forms of electronics.

Modularized construction of general integrated circuits on individual carbon nanotubes.

Monolithic Three‐dimensional Integration of Aligned Carbon Nanotube Transistors for High‐performance Integrated Circuits

Aligned carbon nanotube integrated circuit downsizing toward a sub-10 nm node

Carbon Nanotube Materials for Future Integrated Circuit Applications

Interface States in Gate Stack of Carbon Nanotube Array Transistors.

High-Performance Complementary Transistors and Medium-Scale Integrated Circuits Based on Carbon Nanotube Thin Films.

Highly Uniform Carbon Nanotube Field-Effect Transistors and Medium Scale Integrated Circuits.

Reconfigurable Five-In-One Carbon Nanotube Optoelectronic Transistor for Intelligent Computing and Communication

Carbon Nanotube Integrated Circuit Technology: Purification, Assembly and Integration

Progress on a Carbon Nanotube Field-Effect Transistor Integrated Circuit: State of the Art, Challenges, and Evolution

Carbon nanotube-based CMOS transistors and integrated circuits

Carbon Nanotube Field‐Effect Transistors: Towards Entire‐Carbon‐Nanotube Circuits: the Fabrication of Single‐Walled‐Carbon‐Nanotube Field‐Effect Transistors with Local Multiwalled‐Carbon‐Nanotube Interconnects (adv. Mater. 13/2009)

Configurable Multifunctional Integrated Circuits Based On Carbon Nanotube Dual-Material Gate Devices

(Invited) High-Performance Carbon Nanotube Based Flexible Electronics for Integrated Smart Sensor System

Flexible Integrated Circuits Based on Carbon Nanotubes

Inner Doping of Carbon Nanotubes with Perovskites for Ultralow Power Transistors

High-Performance Carbon Nanotube Thin-Film Transistor Technology

Nanowelded Multichannel Carbon-Nanotube Field-Effect Transistors (MC-CNTFETs)

Carbon nanotube field-effect transistors for use as pass transistors in integrated logic gates and full subtractor circuits.

Carbon Based High Performance Doping-Free Nanoelectronic and Optoelectronic Devices

Selective positioning and integration of individual single-walled carbon nanotubes.