Controllable atomic-scale sculpting and deposition of carbon nanostructures on graphene.

Tao Xu,Xiao Xie,Kuibo Yin,Jun Sun,Longbing He,Litao Sun

DOI: https://doi.org/10.1002/smll.201303377

IF: 13.3

2014-01-01

Small

Abstract:major reason for this is that EBID depends not only on the electron beam conditions but also on the surface concentration of contaminating hydrocarbons. [ 1,28 ] More seriously, it is hard to quantify this concentration, although we know that the hydrocarbons mainly come from either impurities in the TEM column or from adsorption on the specimen surface, or from both. Hence, it is very diffi cult to realize controllable nanofabrications by EBIS or EBID to date. Here in an attempt to describe the relationship between EBIS and EBID, nanopores in a graphene membrane or carbon nanodots on its surface were fabricated by focused electron beam (diameter smaller than 10 nm) with various current densities or irradiation time. It is found that EBIS is signifi cant when the current density is larger than 500 A/cm 2 , while EBID begins to dominate when the current density is less than 300 A/cm 2 . A simplifi ed model has been proposed to explain the experiments quantitatively. We believe that our results have signifi cance in the fabrication of carbon nanostructures, and also provide an effective way to fabricate nanofl uidics and nanoelectronics. Figure 1 a–c demonstrates a typical sputtering process induced by a high intensity focused electron beam on a graphene membrane. Figure 1 a shows a region of pristine graphene before electron irradiation with the circle denoting the region which was exposed to the electron beam. The current density was ∼2.0 × 10 3 A/cm 2 . Figure 1 b shows the same region after 20 s of electron irradiation. The exposed area is clearly altered and shows obvious damage to the membrane confi rmed by disordered structures. Another 28 seconds later, as shown in Figure 1 c, a nanopore has been formed at the center of the irradiation region, where the electron beam current density is higher. It is noted that there is a damaged region between the pore and the pristine graphene. These can be understood from the common assumption that the amount of irradiation damage is proportional to the accumulated irradiation dose. To further understand the sputtering process, we recorded the relationship between nanopore diameter and irradiation time by drilling tens of nanopores using the same beam conditions. Figure 1 d shows the size of graphene nanopores as a function of irradiation time. The electron beam used in Figure 1 d is shown in Figure 1 e. It has a typical Gaussian intensity distribution with a full width at half maximum of 5 nm and a maximum density of ∼ 4.3 × 10 3 A/cm 2 at the center (Figure S1). The thickness of graphene, which had been determined by imaging the edge of the nanopores, was ∼1.7 nm (5 layers). As shown in Figure 1 d, longer the Nanostructures