Accurate Determination of Terahertz Optical Constants by Vector Network Analyzer of Fabry-Perot Response

Wenfeng Sun,Bin Yang,Xinke Wang,Yan Zhang,Robert Donnan
DOI: https://doi.org/10.1364/ol.38.005438
2013-01-01
Abstract:We present a method based on a Fabry-Perot model to efficiently and accurately estimate optical constants of wafer samples in transmission-only measurements performed by a vector network analyzer (VNA). The method is demonstrated on two separate wafer samples: one of silicon and the other of polymethylmethacrylate. Results show that the method can not only acquire optical constants accurately and simply over a broad frequency domain but also overcome the limitations of calculation for dispersive and lossy materials to which existing methods are susceptible, such as those based on VNA-driven quasi-optical transmissometers and terahertz time-domain spectrometry. (C) 2013 Optical Society of America
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