Interfacial Thermal Conductance of Transfer‐Printed Metal Films

Dong-Wook Oh,Seok Kim,John A. Rogers,David G. Cahill,Sanjiv Sinha
DOI: https://doi.org/10.1002/adma.201102994
IF: 29.4
2011-01-01
Advanced Materials
Abstract:IO N Deterministic assembly of microdevices by transfer-printing is an advanced manufacturing technology that enables the heterogeneous integration of disparate materials on largearea substrates.[1–5] All active electronic devices generate heat as a byproduct of their operation and thermal management of transfer-printed assemblies must be a consideration whenever the heat flux is large. While the thermal conductivities of most materials used in microelectronics are well known, the thermal conductance of interfaces formed by transfer-printing is unknown. We report studies of the thermal conductance of interfaces formed by transfer-printing of Au and Au(Pd) alloy thin films, 100 μm × 100 μm in area and 100 nm thick, on amorphous SiO2 , hydrogen-terminated Si(001), and singlecrystal Al2O3 substrates. We find that the thermal conductance Gt of transfer-printed interfaces spans a relatively small range, 10 10 kW cm−2. The thermal conductance G of interfaces formed by physical vapor deposition of metal films on dielectric substrates has been studied extensively. G is the transport coefficient that relates the heat flux JQ to the temperature drop ΔT at an interface, JQ = GT . The observed values span a large range, from a low conductance of G ≈ 10 MWm−2K−1 for Bi deposited on hydrogen-terminated diamond[6] to a high conductance[7] of G ≈ 700 MWm−2K−1 for epitaxial TiN/MgO. Often,
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