Abstract:Density functional theory at the level of (U)B3LYP has been used to explore the dissociation of PH3 on the adatom site (Si-a) and rest atom site (Si-r) of the Si(111)-7 x 7 surface. A detailed comparison between PH3 and NH3 adsorption on Si(111)-7 x 7 is performed. Our results show that PH3 initial dissociation to adsorbed species, PH2(a) and H(a), is facile and preferentially occurs on the Si-r site. The same trend was found for NH3, but PH3 shows a site selectivity higher than NH3. XH2(a) is thermally stable, and an elevated temperature is required for further X-H (X = N or P) bond decomposition. The general mechanism for further X-H bond decomposition is XHn (n = 2 or 1) insertion into Si-Si backbond, followed by H-2 liberation, with the former usually being the rate-determining step. Full XH3 decomposition may lead to the formation of Si=X or Si3X unit with the preference on the Si-r site for N and that on the Si-a site for P. Such a difference should be attributed to X-H bond energy difference, the atomic radius difference between P and N, and the release of the strain energy of the reconstructed surface. We anticipate that the detailed energetics obtained from this study can be used as the quantum-mechanical input for a chemical-kinetics model of chemical vapor deposition.

A Comparative Study of CCl4reactions on Ag and Si Surfaces Byin Situultraviolet Photoemission Electron Microscopy

Photoemission Study of CCl4 Adsorption on Si(111)-7×7

Theoretical studies on the near edge X-ray absorption fine structure spectra of a hexanethiolate monolayer on Ag(100)

Theoretical Studies of Near-Edge X-Ray Absorption Fine Structure for So2/Ag(110)

Theoretical studies on the near edge X-ray absorption fine structure spectra of a hexanethiolate monolayer on Ag(1 0 0)

Theoretical studies of the structure of C2H2 adsorbed on Si(001)

MULTIPLE-SCATTING CLUSTER STUDIES OF SO2 ADSORBED ON Ag(110)

Surface Vs. Bulk Electronic Structure of Silver Determined by Photoemission

STUDIES OF Na ADSORBED ORDERLY AND DISORDERLY ON Si(111) SURFACE USING PES

The Chemisorption of Tetracene on Si(100)-2x1 Surface

Pits and Adatoms at the Interface of 1-Ml C-84/Ag (111)

Core-Level Anionic Photofragmentation of Gaseous Ccl4 and Solid-State Analogs

Oxygen Adsorption on Ag∕Si(111)-7×7 Surfaces

The geometry structure and electronic states of chlorine on Cu(111) surface

Dissociative Adsorption of Ph3 on the Si(111)-7 X 7 Surface: A Theoretical Investigation

A Density-Functional Theory Study on the Chemisorption and Stm Images of Ag(100)/O Surface

Chlorine On Ag(111) - The Intermediate Coverage Case

Adsorption Of Ammonia On Si(100), (111) Surfaces - A Theoretical Approach

Study Of The Na-Si(111) 3x1 Interface Using Core-Level Photoemission Spectroscopy

INTERACTION BETWEEN Li ATOMS ON Si(100)2×1 AND PHASE CHANGE OF SURFACE STRUCTURE

Aggregation of Organic Molecules on Silver Surface with the Balance Between Molecule–substrate Interaction and Intermolecular Interaction