Abstract:Tunable optical material properties enable novel applications in both versatile metamaterials and photonic components including optical sources and modulators. Transparent conductive oxides (TCOs) are able to highly tune their optical properties with applied bias via altering their free carrier concentration and hence plasma dispersion. The TCO material indium tin oxide (ITO) exhibits unity-strong index changes, and epsilon-near-zero behavior. However, with such tuning the corresponding high optical losses, originating from the fundamental Kramers-Kronig relations, result in low cavity finesse. However, achieving efficient tuning in ITO-cavities without using light matter interaction enhancement techniques such as polaritonic modes, which are inherently lossy, is a challenge. Here we discuss a novel one-dimensional photonic crystal nanobeam cavity to deliver a cavity system offering a wide range of resonance tuning range, while preserving physical compact footprints. We show that a vertical Silicon-slot waveguide incorporating an actively gated-ITO layer delivers ~3.4 nm of tuning. By deploying distributed feedback, we are able to keep the Q-factor moderately high with tuning. Combining this with the sub-diffraction limited mode volume (0.1 ({\lambda}/2n)3) from the photonic (non-plasmonic) slot waveguide, facilitates a high Purcell factor exceeding one thousand. This strong light-matter-interaction shows that reducing the mode volume of a cavity outweighs reducing the losses in diffraction limited modal cavities such as those from bulk Si3N4. These tunable cavities enable future modulators and optical sources such as tunable lasers.

Selective tuning of high-Q silicon photonic crystal nanocavities via laser-assisted local oxidation.

Mode Selection in InGaAs/InGaAsP Quantum Well Photonic Crystal Lasers Based on Coupled Double-Heterostructure Cavities.

Fabrication of Optical Cavities with Femtosecond Laser Pulses

Mode Selection in L40 Photonic Crystal Cavities Via Spatially Distributed Pumping

On-Chip Electro-Optic Tuning of A Lithium Niobate Microresonator with Integrated In-Plane Microelectrodes

Digital resonance tuning of high-Q/Vm silicon photonic crystal nanocavities by atomic layer deposition

Selective tuning of optical modes in a silicon comb-like photonic crystal cavity

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

In-situ tuning of optomechanical crystals with nano-oxidation

High- Q Photonic Crystal Cavity in a Single-Mode Silicon Ridge Waveguide

Silicon photonic crystal cavities at near band-edge wavelengths

Radio Frequency Regenerative Oscillations in Monolithic High-Q/V Heterostructured Photonic Crystal Cavities

Low-loss Tunable 1-D ITO-slot Photonic Crystal Nanobeam Cavity

Photon-level Tuning of a High-Q Lithium Niobate Photonic Crystal Nanocavity

Optical Modulation of Graphene-Cladded Silicon Photonic Crystal Cavity

All-optical Control of Ultrahigh-Q Silica Microcavities with Iron Oxide Nanoparticles.

Photon-level tuning of photonic nanocavities

Dynamic Tuning of the Q Factor in a Photonic Crystal Nanocavity Through Photonic Transitions.

Tuning on Optical Resonances of Microcavities Based on Thermal Dissipation Control

Deterministic integrated tuning of multi-cavity resonances and phase for slow-light in coupled photonic crystal cavities

Dispersion engineering of high-Q silicon microresonators via thermal oxidation