Crystallographic and Eigenmode Dependence of TCf for Single Crystal Silicon Contour Mode Resonators

H. Zhu,G. C. Shan,C. Tu,J. E. -Y. Lee
DOI: https://doi.org/10.1109/memsys.2013.6474354
2013-01-01
Abstract:This paper reports the effects of crystal orientations on the temperature coefficient of frequency (TCF) of single crystal silicon square plate micromechanical resonators vibrating in two distinct contour modes: Lame mode and square extensional (SE). For the Lame mode, the same TCf was found over several devices aligned to the < 110 > direction, while much greater variation in the TCf was observed among the devices aligned against the < 100 > direction. For the SE mode, the devices in both < 100 > and < 110 > orientations exhibit similar TCf values for varying doping levels. These observations are supported by Keyes theory and close agreement between experiments and simulations is shown.
What problem does this paper attempt to address?