Abstract:Polar 4H-SiC nano-resonators can host localized surface phonon polaritons (SPhPs) with low optical loss and fully exploit light–matter interactions for promising nanophotonic applications such as surface-enhanced spectroscopies and thermal imaging. To expand the mid-infrared and infrared application spaces, a sound knowledge of temperature effect on infrared dielectric functions and SPhPs of 4H-SiC is required, yet it remains largely unexplored. Herein, we focus on exploiting the temperature influence on dielectric functions, hybridization of propagating and localized SPhPs, and tailed spectral radiation properties of 4H-SiC nanopillar arrays through spectroscopic ellipsometry (SE) measurements as well as multiscale simulations. The 4H-SiC crystal is grown using the physical vapor transport method, and SE experiments measure infrared dielectric functions at temperatures between 300 and 800 K. Finite-element electromagnetic simulations confirm the emerged Monopole and transverse dipoles (TD1 and TD2) resonance modes in 4H-SiC nano-resonators, which agrees with the literature experiment. At high temperatures with strong lattice vibration, the amplitudes of resonant optical absorption peaks gradually decrease and the linewidths broaden, accompanied by the weakened electric resonances. First-principles calculations show that the anharmonic phonon scattering strengthens and less optical phonons are coupled to incident photons as temperature increases. Moreover, the propagating and localized SPhPs' hybridization and spectral radiation properties of 4H-SiC nanopillar arrays can be largely tailed by modifying the morphology and incident angle of light. This work provides physical insights into the temperature-induced spectral tuning of 4H-SiC nano-resonators and helps exploit their applications in the high-temperature working conditions.

Temperature dependence of torsional and flexural modes in 6H-SiC microdisk resonators

6H-Sic Microdisk Torsional Resonators in a “Smart-Cut” Technology

Crystallographic and Eigenmode Dependence of TCf for Single Crystal Silicon Contour Mode Resonators

Calibrating temperature coefficient of frequency (TCf) and thermal expansion coefficient (α) of MoS2 nanomechanical resonators

Smart-cut 6H-silicon carbide (SiC) microdisk torsional resonators with sensitive photon radiation detection

Dependence of Temperature Coefficient of Frequency (tcf) on Crystallography and Eigenmode in N-Doped Silicon Contour Mode Micromechanical Resonators

Spatial Mapping of Multimode Brownian Motions in High-Frequency Silicon Carbide Microdisk Resonators

TC$f$ Manipulation in AlScN Nanomechanical Resonators Using Dual-Mode Parametric Excitation

Silicon carbide-on-insulator thermal-piezoresistive resonator for harsh environment application

Temperature Coefficient of Frequency Modeling for Cmos-Mems Bulk Mode Composite Resonators

Temperature Characteristic of Ring Resonator in Polarization Maintaining Silica Optical Waveguide

Size- and Temperature-Dependent Young's Modulus of SiC Nanowires Determined by a Laser-Doppler Vibration Measurement

Self-Temperature-Compensated GaN MEMS Resonators Through Strain Engineering Up to 600 K

Frequency-Temperature Relations of Novel Cuts of Quartz Crystals for Thickness-Shear Resonators

Methods for precisely controlling the residual stress and temperature coefficient of the frequency of a MEMS resonator based on an AlN cavity silicon-on-insulator platform

Highly Sensitive Temperature Sensor Based on Coupled-Beam MN-on-Si MEMS Resonators Operating in Out-of-Plane Flexural Vibration Modes

Low-Temperature-Dependent Raman Study on A(1)(Lo) Mode of 6H-Sic

Modulated temperature sensitivity based on silicon ring resonators with titanium dioxide cladding

Temperature-sensitive hybridization of propagating and localized surface phonon polaritons in polar 4H-SiC nano-resonators

Design, Modeling, and Simulation of Quartz-Crystal-tuning-fork-resonators-based Micro Temperature Sensor

Realization and Direct Observation of Five Normal and Parametric Modes in Silicon Nanowire Resonators by in Situ Transmission Electron Microscopy