Large-Area Cold Atmospheric Pressure Discharges Realized by Mesh Covered Tube-Plate Electrodes in Open Air

Qiang Chen,Hajime Shirai
DOI: https://doi.org/10.1109/tps.2013.2241081
IF: 1.368
2013-01-01
IEEE Transactions on Plasma Science
Abstract:A large-area atmospheric pressure plasma with low temperature and high electron density was realized using mesh covered tube-plate electrodes at an RF power as low as 4 W. The gas temperature is less than 351 K, while the electron temperature is about 5000 K. The estimated electron density is on the order of 10(12) cm(-3). Electrical measurements indicate that the discharges are capacitive and operated in an abnormal glow discharge mode. In addition, a self-bias observed at the powered tube electrode increases with increasing power and is positive at high powers.
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