Fabrication and DC Characterization of InAs/AlSb Self-Switching Diodes

Andreas Westlund,Giuseppe Moschetti,Huan Zhao,Per-Ake Nilsson,Jan Grahn
DOI: https://doi.org/10.1109/iciprm.2012.6403320
2013-01-01
Abstract:Fabrication and DC measurements of an InAs/AlSb self-switching diode (SSD), aimed for THz detection, is presented. An SSD with a channel width of 160 nm and a trench width of 240 nm was designed and fabricated in a process using an in situ passivation procedure of the oxidation-sensitive trench. Rectifying behavior was observed in the I-V characteristics. The device performance was relatively stable over a period of three months.
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