Implementation of A Flexible Silicon-Based Tactile Sensor Array

Chih-Fan Hu,Hsin-Yu Huang,Chih-Chieh Wen,Li-Yuan Lin,Weileun Fang
DOI: https://doi.org/10.1109/icsens.2010.5689897
2010-01-01
Abstract:This study reports an easy approach to realize the flexible sensor array. The silicon-based sensor chip is discretized into small chip array. The rigid but small silicon-based pressure sensors and flexible polymer material are integrated to implement the flexible tactile sensor array. The electrical routings for sensing signals are achieved using the through-silicon interconnects and electroplated metal wires on polymer. The measurement results show that the sensitivity of tactile sensor can be up to 0.122 mV/V/kpa and the nonlinearity is about 1.7%. The bending test shows that the flexible sensor has a radius of curvature of 5.2mm. This study has successfully embedded the flexible sensor in the shoe pad to demonstrated the feasibility of wearable smart device.
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