III–V Multiple-Gate Field-Effect Transistors with High-Mobility $\hbox{in}_{0.7}\hbox{ga}_{0.3}\hbox{as}$ Channel and Epi-Controlled Retrograde-Doped Fin

Hock-Chun Chin,Xiao Gong,Lanxiang Wang,Hock Koon Lee,Luping Shi,Yee-Chia Yeo
DOI: https://doi.org/10.1109/led.2010.2091672
IF: 4.8157
2011-01-01
IEEE Electron Device Letters
Abstract:We report an In0.7Ga0.3As n-channel multiplegate field-effect transistor (MuGFET), featuring a lightly doped high-mobility channel with 70% indium and an epi-controlled retrograde-doped fin structure to suppress short-channel effects (SCEs). The retrograde well effectively reduces subsurface punch-through in the bulk MuGFET structure. The multiple-gate structure achieves good electrostatic control of the channel potential and SCEs in the In0.7Ga0.3As n-MuGFETs as compared with planar In0.7Ga0.3As MOSFETs. The In0.7Ga0.3As n-MuGFET with 130-nm channel length demonstrates a drain-induced barrier lowering of 135 mV/V and a drive current exceeding 840 mu A/mu m at V-DS = 1.5 V and V-GS - V-T = 3 V.
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