Broad‐range, High‐linearity, and Fast‐response Pressure Sensing Enabled by Nanomechanical Resonators Based on 2D Non‐layered Material: Β‐in2s3
Junzhi Zhu,Song Wu,Luming Wang,Jiaqi Wu,Jiankai Zhu,Luwei Zou,Fei Xiao,Ziluo Su,Chenyin Jiao,Shenghai Pei,Zejuan Zhang,Jiaze Qin,Bo Xu,Yu Zhou,Juan Xia,Zenghui Wang
DOI: https://doi.org/10.1002/inf2.12553
2024-01-01
InfoMat
Abstract:Two-dimensional (2D) non-layered materials, along with their unique surface properties, offer intriguing prospects for sensing applications. Introducing mechanical degrees of freedom is expected to enrich the sensing performances of 2D non-layered devices, such as high frequency, high tunability, and large dynamic range, which could lead to new types of high performance nanosensors. Here, we demonstrate 2D non-layered nanomechanical resonant sensors based on beta-In2S3, where the devices exhibit robust nanomechanical vibrations up to the very high frequency (VHF) band. We show that such device can operate as pressure sensor with broad range (from 10(-3 )Torr to atmospheric pressure), high linearity (with a nonlinearity factor as low as 0.0071), and fast response (with an intrinsic response time less than 1 mu s). We further unveil the frequency scaling law in these beta-In2S3 nanomechanical sensors and successfully extract both the Young's modulus and pretension for the crystal. Our work paves the way towards future wafer-scale design and integrated sensors based on 2D non-layered materials. image