Silicon-on-insulator Microring Resonator for Ultra Dense WDM Applications

Zhen Sheng,Liu,Sailing He,Van Thourhout, D.

DOI: https://doi.org/10.1109/group4.2009.5338316

2009-01-01

Abstract:We demonstrate design, fabrication and measurement of silicon-on-insulator microring resonators suitable for ultra dense WDM applications with a channel spacing of 0.1 nm. Considerations about applying it to practical use are also discussed.

What problem does this paper attempt to address?

Compact microring resonators integrated with grating couplers working at 2 μm wavelength on silicon-on-insulator platform.

Zecen Zhang,Geok Ing Ng,Haodong Qiu,Wanjun Wang,Xin Guo,Mohamed S Rouifed,Chongyang Liu,Hong Wang

DOI: https://doi.org/10.1364/AO.56.005444

IF: 1.9

2017-01-01

Applied Optics

Abstract:Compact all-pass and add-drop microring resonators (radius=10 μm) integrated with grating couplers working at 2 μm wavelength are designed, fabricated, and characterized on a commercial 340-nm-thick-top-silicon silicon-on-insulator platform. They are suitable for high-volume integrated optical circuits at 2 μm wavelength as the fabrication process involved are uncomplicated and complementary metal-oxide-semiconductor (CMOS)-process compatible, thus making them more convenient to be utilized. The performance of the grating couplers, based on four most important parameters, has been simulated and optimized. The simulation and experimental results of grating couplers show the lowest coupling loss of 4.5 dB and 6.5 Db, respectively. By utilizing the grating couplers to couple light in and out from the chip, the designed microring resonators have been tested. The experimental results of microring resonators show that an extinction ratio of 12 dB and a quality factor of 11,200 can be achieved. To the best of our knowledge, this is thus far the smallest microring resonator ever demonstrated at this wavelength.
Dense Wavelength Conversion and Multicasting in a Resonance-Split Silicon Microring

Qiang Li,Ziyang Zhang,Fangfei Liu,Min Qiu,Yikai Su

DOI: https://doi.org/10.1063/1.2976123

IF: 4

2008-01-01

Applied Physics Letters

Abstract:We experimentally demonstrate all-optical wavelength conversions in a 10 μm radius resonance-split silicon microring resonator based on free carrier dispersion effect. The split resonance is caused by the mutual coupling between the two countertraveling modes inside the ring resonator. Dense wavelength conversions are performed at data rates from 500 Mbytes/s to 5 Gbytes/s and a dual-channel wavelength multicasting is realized at a data rate of 1.25 Gbytes/s. The resonance splitting phenomenon opens up opportunities to convert more closely spaced wavelengths, thus effectively increasing the system capacity.
Modeling And Analysis Of Silicon-On-Insulator Elliptical Microring Resonators For Future High-Density Integrated Photonic Circuits

Kang Xiong,Xi Xiao,Ying-Tao Hu,Zhi-Yong Li,Tao Chu,Yu-De Yu,Jin-Zhong Yu

DOI: https://doi.org/10.1088/1674-1056/21/7/074203

2012-01-01

Abstract:We propose a novel resonator containing an elliptical microring based on a silicon-on-insulator platform. Simulations using the three-dimensional finite-difference time-domain method show that the novel elliptical microring can efficiently enhance the mode coupling between straight bus waveguides and resonator waveguides or between adjacent resonators while preserving relatively high intrinsic quality factors with large free spectral range. The proposed resonator would be an alternative choice for future high-density integrated photonic circuits.
Microring-based Ratio-Metric Wavelength Monitor on Silicon.

Bing Yang,Ao Shen,Chen Qiu,Ting Hu,Longzhi Yang,Hui Yu,Xiaoqing Jiang,Yubo Li,Yinlei Hao,Jianyi Yang

DOI: https://doi.org/10.1364/ol.39.003298

IF: 3.6

2014-01-01

Optics Letters

Abstract:An integrated dual-ring ratio-metric wavelength monitor (DR-RMWM) with ultra-high wavelength resolution and compact size is demonstrated. Two microrings are used as the edge filters and designed to achieve an "X-type" spectral response in a particular wavelength range. It is fabricated with the CMOS-compatible fabrication process on the silicon-on-insulator. The measured wavelength resolution is 5 pm in a 1.2 nm wide wavelength range. By tuning the resonant wavelength thermally, the functional wavelength range can be shifted. The DR-RMWM can find applications in wavelength monitoring systems, especially the on-chip systems.
Microring Based Ratio-Metric Wavelength Monitor on Silicon

Ao Shen,Bing Yang,Ting Hu,Tingge Dai,Chen Qiu,Yubo Li,Yinlei Hao,Xiaoqing Jiang,Jianyi Yang

DOI: https://doi.org/10.1117/12.2051736

2014-01-01

Abstract:An integrated high-resolution ratio-metric wavelength monitor (RMWM) is demonstrated on SOI platform. The device consists of a reconfigurable demultiplexing filter based on cascaded thermally tunable microring resonators (MRRs) and Ge-Si photodetectors integrated with each drop port of the MRRs. The MRRs are supposed to achieve specific resonant wavelength spacing to form the “X-type” spectral response between adjacent channels. The ratio of the two drop power between adjacent channels varies linearly with the wavelength in the “X-type” spectral range, thus the wavelength can be monitored by investigating the drop power ratio between two pre-configured resonant channels. The functional wavelength range and monitor resolution can be adjusted flexibly by thermally tuning the resonant wavelength spacing between adjacent rings, and an ultra-high resolution of 5 pm or higher is achieved while the resonant spacing is tuned to 1.2nm. By tuning the resonant wavelength of the two MRRs synchronously, the monitor can cover the whole 9.6nm free spectral range (FSR) with only two ring channels. The power consumption is as small as 8 mW/nm. We also demonstrate the multi-channel monitor that can measure multi-wavelength-channel simultaneously and cover the whole FSR by presetting the resonant wavelengths of every MRR without any additional power consumption. The improvements to increase the resolution are also discussed.
Silicon-Based MZI-Embedded Microring Array with Hitless and FSR-Alignment-Free Wavelength Selection

Bei Chen,Zhaoyang Zhang,Li'ao Ye,Tingge Dai,Hui Yu,Yuehai Wang,Jianyi Yang

DOI: https://doi.org/10.1109/lpt.2022.3164405

IF: 2.6

2022-01-01

IEEE Photonics Technology Letters

Abstract:We demonstrate a silicon-based Mach-Zehnder interferometer (MZI)-embedded microring array consisting of four wavelength channels. The embedded MZI in each microring resonator (MRR) works as an ON/OFF key of the resonance, and can offer larger operating wavelength range. The footprint of the core elements is only $180.6\,\,\mu \text{m}\,\,\times 476.1\,\,\mu \text{m}$ . The transmission performances of four wavelength channels keep with good consistency within a 35.2-nm-wide wavelength range. The insertion loss of each channel is less than 3.05 dB. Its rising response time of the ON/OFF status transition is about $4.8~\mu \text{s}$ . Moreover, since the array does not require the free spectral range (FSR)-alignment and the on-chip thermal crosstalk is slight, the hitless wavelength selection can be realized simply without any electronic control assistance. Our experiment results indicate that such compact, and scalable array with the function of easily-implemented hitless wavelength selection may provide another solution for large-scale wavelength division multiplexing (WDM) network.
Integrated Reconfigurable Microring Based Silicon Wdm Receiver for On-Chip Optical Interconnect

Ao Shen,Chen Qiu,Long-Zhi Yang,Ting-Ge Dai,Yin-Lei Hao,Xiao-Qing Jiang,Jian-Yi Yang

DOI: https://doi.org/10.1088/2040-8978/17/5/055801

IF: 2.1

2015-01-01

Journal of Optics

Abstract:We demonstrate an integrated reconfigurable wavelength division multiplexing receiver on the silicon-on-insulator (SOI) platform. The receiver is composed of a 1 x 8 thermally tunable microring resonator filter and Ge-Si photodetectors. With low thermal tuning powers the channel allocation of the receiver can be reconfigured with high accuracy and flexibility. The thermal tuning efficiency is approximately 8 mW nm(-1). We show eight-channel configurations with channel spacing of 100 GHz and 50 GHz and a configuration in which all eight channels cover an entire free spectral range of the ring with uniform channel spacing of 1.2 nm. Each channel can receive high-quality signals with a data rate of up to 13.5 Gb s(-1); thus an aggregate data rate higher than 100 Gb s(-1) can be achieved.
Channel-Selectable Optical Link Based on a Silicon Microring for On-Chip Interconnection

Qiu Chen,Hu Ting,Wang Wan-Jun,Yu Ping,Jiang Xiao-Qing,Yang Jian-Yi

DOI: https://doi.org/10.1088/0256-307x/29/9/094204

2012-01-01

Chinese Physics Letters

Abstract:A channel-selectable optical link based on a silicon microring resonator is proposed and demonstrated.This optical link consists of the wavelength-tunable microring modulators and the filters,defined on a silicon-on-insulator (SOI) platform.With a p-i-n junction embedded in the microring modulator,light at the resonant wavelength of the ring resonator is modulated.The 2nd-order microring add-drop filter routes the modulated light.The channel selectivity is demonstrated by heating the microrings.With a thermal tuning efficiency of 5.9mW/nm,the filter drop port response was successfully tuned with 0.8nm channel spacing.We also show that modulation can be achieved in these channels.This device aims to offer flexibility and increase the bandwidth usage efficiency in optical interconnection.
Silicon Micro-Cavities And Their System Applications

Min Qiu,Qiang Li,Ziyang Zhang,Fangfei Liu,Qingjiang Chang,Yikai Su

DOI: https://doi.org/10.1117/12.813540

2009-01-01

Abstract:We experimentally demonstrate resonance-splitting and enhanced notch as a result of the mutual mode coupling in silicon ring resonator. Dense wavelength conversions, wavelength multicasting and optical up-converter are demonstrated in the split silicon ring resonator. A temporal differentiator and format conversion from NRZ to AMI are demonstrated utilizing the filtering effect of ring resonator. Photonic phase shifter and delay line are demonstrated utilizing the phase shift of ring resonator.
Concentric Silicon Micro-Ring Resonators with Enhanced Transmission Notch Depth

Xiaohui Li,Ziyang Zhang,Qiang Li,Min Qiu,Yikai Su

DOI: https://doi.org/10.1117/12.804230

2008-01-01

Abstract:In this work, we have analyzed, fabricated and demonstrated concentric micro-ring resonators in silicon-on-insulator (SOI) structure for enhanced transmission notches. The operation principles of the concentric ring resonators are studied by time-domain coupled-mode theory. Directional coupling between concentric rings offers another freedom in designing deep notch optical filters and ultra-sensitive biosensors. The finite-difference-time-domain (FDTD) simulations have shown the improvement of the notch depth, evenly distributed mode field and the effect of the resonance shift. The device is demonstrated in silicon-on-insulator structure. Transmission notch depth improvement of ~ 15dB is demonstrated for the 21-20.02-μm-radius double-ring structure comparing with the single 21-μm-radius ring.
Dense Wavelength Division Multiplexer based on Microring Resonators

Nur Musyiirah Haji Masri,M. R. Uddin,Law Foo Kui

DOI: https://doi.org/10.1109/SCORED.2018.8710999

2018-11-01

Abstract:This paper demonstrates a dense wavelength division multiplexer (DWDM) based on microring resonators using ring radius variation method. In this design, the spacing between each channel was kept constant at 0.8nm throughout the S, C and L bands. The reference ring size of the ring resonator was 1um. By analysing the relationship between the resonance wavelength and ring radius, the ring radius variation of 10nm was selected in order to give the constant channel spacing of 0.8nm. As a result, 91 number of ring resonators has been implemented into the DWDM to 83, 33 and 71 channels respectively into the S, C and L bands. Hence the total number of channels that can be incorporated into the system is 187 channels.

Engineering,Physics
Wavelength-selective 4 × 4 Nonblocking Silicon Optical Router for Networks-on-chip.

Ting Hu,Huiye Qiu,Ping Yu,Chen Qiu,Wanjun Wang,Xiaoqing Jiang,Mei Yang,Jianyi Yang

DOI: https://doi.org/10.1364/ol.36.004710

2011-01-01

Abstract:We design and fabricate a wavelength-selective nonblocking 4 × 4 silicon optical router based on microring resonator for use in future integrated photonic interconnection networks. We successfully demonstrate 12 possible I/O routing paths and present 13 nonblocking operating states, including four broadcasting states, with worst-case extinction ratio and cross talk of 21.05 and -21.56 dB, respectively. Thermal tuning is employed to compensate the resonance shift of microring resonators caused by fabrication errors and adjust the resonance to match the International Telecommunication Unit grid with the channel spacing of 100 GHz.
A Tunable 1&#x00d7;8 Silicon Microring Mux/DeMux WDM Filters

Chen Qiu,Ao Shen,Qinfen Hao,Jianyi Yang

DOI: https://doi.org/10.1109/sum.2014.111

2014-01-01

Abstract:We demonstrate a silicon 1×8 micro ring Mux/DeMux WDM filter with tunable channel spacing. The channel of the filters is tuned by thermal-optical tuners with 100GHz and 50GHz spacing respectively.
Ultra-compact Mode-Split Silicon Microring Resonator for Format Conversion from NRZ to FSK

Fangfei Liu,Qiang Li,Ziyang Zhang,Min Qiu,Yikai Su

DOI: https://doi.org/10.1117/12.802850

2008-01-01

Abstract:We propose and experimentally demonstrate all optical format conversion from non-return-to-zero (NRZ) format to frequency-shift-keying (FSK) format based on free carrier dispersion effect in a silicon mode-split microring resonator. The injection of the high-power NRZ signal generates free carriers leading to the blue shift of the spectrum when a '1' comes. Therefore, there is a selective filtering for the two probes with certain separation located at different position of the split mode according to the information carried by the NRZ signal. Then the NRZ signal is converted to the FSK format. The microring resonator features ultra-compact size with a radius of 10 μm thus is suitable for integration with silicon-on-insulator (SOI) based optical and electronic devices. The split mode can provide large and variable frequency deviation for the FSK signal. 1 Gb/s NRZ signal is successfully converted to FSK format with a frequency deviation of 40 GHz, which can find application for interconnection between a metropolitan area networks (MAN) and a passive optical network (PON) system.
Passive Devices at 2 Μm Wavelength on 200 Mm CMOS-compatible Silicon Photonics Platform [Invited]

Hui Ma,Haotian Yang,Bo Tang,Maoliang Wei,Junying Li,Jianghong Wu,Peng Zhang,Chunlei Sun,Lan Li,Hongtao Lin

DOI: https://doi.org/10.3788/col202119.071301

IF: 2.56

2021-01-01

Chinese Optics Letters

Abstract:As a promising spectral window for optical communication and sensing, it is of great significance to realize on-chip devices at the 2 μm waveband. The development of the 2 μm silicon photonic platform mainly depends on the performance of passive devices. In this work, the passive devices were fabricated in the silicon photonic multi-project wafer process.The designed micro-ring resonator with a 0.6 μm wide silicon ridge waveguide based on a 220 nm silicon-on-insulator platform achieves a high intrinsic quality factor of 3.0 × 105. The propagation loss is calculated as 1.62 d B/cm. In addition,the waveguide crossing, multimode interferometer, and Mach–Zehnder interferometer were demonstrated at 2 μm with good performances.
Micrometer-scale Optical Up-Converter Using a Resonance-Split Silicon Microring Resonator in Radio over Fiber Systems

Qingjiang Chang,Qiang Li,Ziyang Zhang,Min Qiu,Yikai Su

DOI: https://doi.org/10.1364/nfoec.2009.jwa48

2009-01-01

Abstract:We propose and demonstrate a novel micrometer-scale optical up-converter for converting 1-Gb/s data to 40-GHz milimeter-wave. This scheme utilizes the free-carrier dispersion effect in a resonance-split silicon microring resonator.
Ultra-Dense Wavelength-Division Multiplexing With Microring Modulator

X. Guan,W. Shi,Leslie Ann Rusch

DOI: https://doi.org/10.1109/JLT.2021.3070515

IF: 4.7

2021-07-01

Journal of Lightwave Technology

Abstract:Silicon photonics can be used to increase the versatility of wavelength division multiplexing (WDM). Ultra-dense wavelength division multiplexing (uDWDM) shrinks channel spacing between WDM channels to decrease guard bands and increase spectral efficiency. Microring modulators (MRMs) provide a simple solution for uDWDM transmitters - they require no multiplexer/demultiplexer. When used with comb lasers, MRMs provide extremely compact and low power solutions. The spectral efficiency is limited by interchannel interference (ICI) from incomplete isolation of channels. We report an MRM-uDWDM transmitter achieving channel spacing comparable to the symbol rate in each WDM channel, reaching a spectrum occupation of 80%. By choosing the correct operating point, we demonstrate experimentally our fabricated MRM chip design causes no discernable ICI power penalty. To the best of our knowledge, this is the first demonstration of MRM-uDWDM to support such dense channel spacing.

Materials Science,Engineering,Physics
Fabrication-Tolerant Four-Channel Wavelength-Division-Multiplexing Filter Based on Collectively Tuned Si Microrings

P. De Heyn,P. Absil,G. Lepage,P. Verheyen,J. Van Campenhout,J. de Coster,M. Pantouvaki,W. Bogaerts,D. van Thourhout

DOI: https://doi.org/10.1109/JLT.2013.2273391

IF: 4.7

2013-07-15

Journal of Lightwave Technology

Abstract:We demonstrate a robust, compact and low-loss four-channel wavelength-division multiplexing (WDM) filter based on cascaded double-ring resonators (2RR) in silicon. The flat-top channel response obtained by the second-order filter design is exploited to compensate for the detrimental effects of local fabrication variations and their associated phase errors on the ring-based filter response. Full wafer-scale characterization of a cascaded, four-channel 2RR filter with channel spacing of 300 GHz shows an average worst-case insertion loss below 1.5 dB and an average worst-case crosstalk below -18 dB across the wafer, representing a substantial improvement over a first-order based ring (1RR) design. The robust 2RR filter design enables the use of a simple collective thermal tuning mechanism to compensate for global fabrication variations as well as for global temperature fluctuations of the WDM filter, the WDM laser source, or both. Highly uniform collective heating is demonstrated using integrated doped silicon heaters. The compact filter footprint of less than 50×50 μm2 per channel enables straightforward scaling of the WDM channel count to 8 channels and beyond. Such low-loss collectively tuned ring-based WDM filters can prove beneficial in scaling the bandwidth density of chip-level silicon optical interconnects.

Materials Science,Engineering,Physics
Demonstration of microring-based WDM-compatible mode-division multiplexing on a silicon chip

Xiaoping Cao,Jian Wang,Shuang Zheng

DOI: https://doi.org/10.1364/CLEO_AT.2018.JW2A.12

2018-05-13

Abstract:Based on silicon chip, we design and fabricate a mode-division (de)multiplexer in conjunction with wavelength-division multiplexing (WDM) by using three single-mode microring resonators. The on-chip device exhibits low mode crosstalk around the wavelength of 1540 nm.

Materials Science,Engineering,Physics
Ultra-High Dynamic Extinction Ratio Electro-Optical Modulator with Coupled Microring on SOI Platform

Zhuo Cheng,Bigeng Chen,Chunlei Sun,Maoliang Wei,Shaoliang Yu,Lan Li,Hongtao Lin,Yunjiang Rao

DOI: https://doi.org/10.1109/acp55869.2022.10089079

2022-01-01

Abstract:A 5 th -order coupled microring electro-optical modulator with PIN structures is proposed and experimentally demonstrated on SOI integrated photonics platform. Ultra-high dynamic extinction ratio (ER) up to 60 dB is achieved benefiting from the high-order optical band-pass filter design. The device size on chip is only 400×220 μm 2 including electrodes and the driving voltage is 2.1 V corresponding to 0.23 W power consumption. Such integrated modulators would be promising in building compact and low-power distributed optical fiber sensing systems using low-background-noise optical pulses.

Silicon-on-insulator Microring Resonator for Ultra Dense WDM Applications

Compact microring resonators integrated with grating couplers working at 2 μm wavelength on silicon-on-insulator platform.

Dense Wavelength Conversion and Multicasting in a Resonance-Split Silicon Microring

Modeling And Analysis Of Silicon-On-Insulator Elliptical Microring Resonators For Future High-Density Integrated Photonic Circuits

Microring-based Ratio-Metric Wavelength Monitor on Silicon.

Microring Based Ratio-Metric Wavelength Monitor on Silicon

Silicon-Based MZI-Embedded Microring Array with Hitless and FSR-Alignment-Free Wavelength Selection

Integrated Reconfigurable Microring Based Silicon Wdm Receiver for On-Chip Optical Interconnect

Channel-Selectable Optical Link Based on a Silicon Microring for On-Chip Interconnection

Silicon Micro-Cavities And Their System Applications

Concentric Silicon Micro-Ring Resonators with Enhanced Transmission Notch Depth

Dense Wavelength Division Multiplexer based on Microring Resonators

Wavelength-selective 4 × 4 Nonblocking Silicon Optical Router for Networks-on-chip.

A Tunable 1&amp;#x00d7;8 Silicon Microring Mux/DeMux WDM Filters

Ultra-compact Mode-Split Silicon Microring Resonator for Format Conversion from NRZ to FSK

Passive Devices at 2 Μm Wavelength on 200 Mm CMOS-compatible Silicon Photonics Platform [Invited]

Micrometer-scale Optical Up-Converter Using a Resonance-Split Silicon Microring Resonator in Radio over Fiber Systems

Ultra-Dense Wavelength-Division Multiplexing With Microring Modulator

Fabrication-Tolerant Four-Channel Wavelength-Division-Multiplexing Filter Based on Collectively Tuned Si Microrings

Demonstration of microring-based WDM-compatible mode-division multiplexing on a silicon chip

Ultra-High Dynamic Extinction Ratio Electro-Optical Modulator with Coupled Microring on SOI Platform

A Tunable 1×8 Silicon Microring Mux/DeMux WDM Filters