Microstructure Methane Sensor Based on Pd-doped SnO2 Nanoparticles

Yu Yingshuo,Wang Dawei,Ma Jian,Liu Fengmin
DOI: https://doi.org/10.1109/mic.2012.6273311
2012-01-01
Abstract:SnO2 nanomaterials were synthesized by an ultrasonic assisted precipitation method, and then Pd was doped on SnO2 by mechanical mixing method. SnO2 materials were characterized by X-ray diffraction. The micro-hotplate was used as the substrate of the sensor. Finally, the sensing properties were evaluated with a static state measuring system. It has been observed that the response of the microstructure sensor based on 1wt% Pd-doped SnO2 exhibited a preferable sensing performance. The response to 3000ppm methane was about 33 at 275 °C and the response and recovery time was about 1 s and 3 s, respectively.
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