Abstract:Structural Health Monitoring, Ahead of Print. Anomalies often occur in metal additive manufacturing from processing inconsistencies and uncertainty. A robust fault detection system that uses sensor measurements such as melt pool imaging has the potential to improve part quality and save production time by anticipating print failure. Toward this goal, we develop and validate a fault detection technique using melt pool geometry-related measurements from an in situ near-infrared optical camera. This method is unsupervised and is trained on a small dataset, mitigating human error in classifying fault types, and reducing lead times for preparing training datasets. Furthermore, this method uses learned geometry-informed nominal behavior of the melt pool signal to make informed decisions on the process health. There are spatial-temporal characteristics embedded in the melt pool images, caused by the periodicity in the geometry-dependent raster pattern. These characteristics can be captured in the frequency domain using the signal spectrogram, a representation of the frequency content over time. Defects will appear in the spectrogram, disrupting the healthy spectral response. To quantify healthy spectrograms, we use principal component (PC) decomposition to extract the features of these spectrograms as a set of nominal basis vectors. Anomaly detection is then performed by calculating the error between the original and reconstructed spectrogram vector by projection of the spectrogram PCs onto the nominal basis. The reconstruction error for anomalous signals is larger than that from healthy signals, which is then used for fault detection. A one-tailed statistical test is used to determine the fault detection threshold for the reconstruction error signal. This method is tested on three raster patterns and performs better than a comparative time-series thresholding method. We demonstrate that this time-frequency algorithm can detect both temporal faults (which occur at a single time instant) and spatial faults (such as those introduced by an improper sintering), differentiating them from nominal operation.

OES structural feature based fault detection method for plasma etching

ICOPE-15-C022 Fault Diagnosis for Steam Turbine Flow Passage Using EMD-KPCA Feature Extraction and Support Vector Machine

Flaw Edge-detection and Feature Parameter Construction in Ultrasonic C-scan Image

Plasma Optical Emission Spectroscopy Based on Feedforward Neural Network

A Principal Component Analysis Based Fault Detection Method in Etch Process of Semiconductor Manufacturing

Plasma Optical Emission Analysis for Chamber Condition Monitor

Virtual Metrology of Critical Dimensions in Plasma Etch Processes Using Entire Optical Emission Spectrum

Explainable artificial intelligence-based evidential inferencing on process faults in plasma etching

Integrated Online Virtual Metrology and Fault Detection in Plasma Etch Tools

Nonlocal Structure Constrained Neighborhood Preserving Embedding Model and Its Application for Fault Detection

Real-Time Plasma Uniformity Monitoring via Selective Plasma Light Intensity Measurement Using Transparent-LCD-Module-Adapted Optical Emission Spectroscopy

Saliency-Based Defect Detection in Industrial Images by Using Phase Spectrum

Endpoint Detection in High Density Plasma Etching System Based on IEP

Damage Detection Based on ESPI and SVM

An unsupervised online anomaly detection method for metal additive manufacturing processes via a statistical time-frequency domain algorithm

Virtual Sensor Based Fault Detection and Classification on a Plasma Etch Reactor

Quantitative Detection of Laser Welding Defective Structure Based on Feature Exaction of the Pulsed Eddy Current Signal

A novel plasma optical emission spectroscopy method with neural network model for improving the accuracy of plasma diagnostics in low-temperature xenon plasma

Spatial-time-state Fusion Algorithm for Defect Detection Through Eddy Current Pulsed Thermography

Online Defect Detection of Al Alloy in Arc Welding Based on Feature Extraction of Arc Spectroscopy Signal

A Spectroscopic Method Based on Support Vector Machine and Artificial Neural Network for Fiber Laser Welding Defects Detection and Classification