Abstract:As a basic micro-optics element, microlens has widespread applications in many fields, whereas the common fabrication methods for microlens compounded from transparent and brittle materials always have a low efficiency and high requirement for environment. Liquid crystal spatial light modulation (SLM) as a light modulation instrument, can realize multi-focus or structured light fields easily, and has important potential application values in optical communication or microfabrication based on ultrafast laser. Herein, a fabrication method is introduced for microlens, which combines the advantages of femtosecond (Fs) laser microfabrication and wetting etch. The key factors influencing the morphology of microlens are analyzed systematically. By introduction of the spatial light field modulation in the femtosecond laser micro/nano fabrication, the number as well as the position of focused spots can be finely controlled, which not only greatly enhances the fabrication efficiency of microlens arrays out of transparent and brittle materials, but also makes it possible to adjust the morphology of femtosecond laser ablation modification dynamically during processing. The application of spatial light field modulation in micro-photonic integrated chip fabrication is well demonstrated.

Simple Method for Fabricating Solid Microlenses with Different Focal Lengths

In Situ Fabrication of a Tunable Microlens.

Flexible fluidic lens with polymer membrane and multi-flow structure

Fabrication of Polymer Microlens Array with Controllable Focal Length by Modifying Surface Wettability

Fabrication of Miniaturized Variable-focus Lens Using Liquid Filling Technique

Discretely Tunable Optofluidic Compound Microlenses.

Fabrication of Polymer Compound Microlens by Lens-on-lens Microstructures

Liquid Microlens with Tunable Focal Length and Light Transmission

Microlens formation technology utilizing multi-phase liquid ambiance

Simple Fabrication of High Focal Number Micro-Lenses Based on a Microfluid Pulse Jetting Method

Facile and Flexible Fabrication of Gapless Microlens Arrays Using A Femtosecond Laser Microfabrication and Replication Process

Solvent-tunable PDMS microlens fabricated by femtosecond laser direct writing

Progress In Femtosecond Laser Fabrication Of Microlens Array With Spatial Light Modulators

A Microlens Array with Different Focal Lengths Fabricated by Roll-To-Roll UV Lithography

Fabrication of High Fill-Factor Microlens Array Using Spatially Constrained Thermal Reflow

Cost-efficient and Flexible Fabrication of Rectangular-Shaped Microlens Arrays with Controllable Aspect Ratio and Spherical Morphology

Versatile Route To Gapless Microlens Arrays Using Laser-Tunable Wet-Etched Curved Surfaces

Single Step Fabrication of Microlens Arrays with Hybrid HfO2-SiO2 Sol-Gel Glass on Conventional Lens Surface

Fabrication Method of Low F-Number Microlens Arrays by Using Surface Coating and Epoxy Dispensing Technology

Fabrication of High Fill Factor Cylindrical Microlens Array with Isolated Thermal Reflow

A Novel Fabricating Method of Micro Lens-on-Lens Arrays with Two Focal Lengths